Charged particle beam device

1. An image acquiring method including the steps of:

providing a charged particle source and generating a primary charged particle beam using the charged particle source;

utilizing a plurality of convergent lenses for converging the primary charged particle beam which is emitted from the charged particle source along an optical axis of the charged particle beam device;

providing a scan coil for scanning the primary charged particle beam on a sample;

using an objective lens for converging the primary charged particle beam and for irradiating the primary charged particle beam on the sample;

providing a sample table for receiving and supporting the sample;

arranging a deflector above the objective lens and using the deflector for tilting the primary charged particle beam, the charged particle beam device being usable for acquiring a stereo pair image of the sample by irradiating on the sample;

tilting the primary charged particle beam by using a swing-back action of the objective lens, the deflector moving a virtual crossover of the primary charged particle beam to a position out of the optical axis when tilting the primary charged particle beam,

locating an aligner between the objective lens and the deflector with the aligner having a beam tilt field-of-view compensation function for compensating a tilt angle (ω 0 ) of the primary charged particle beam by a compensation angle Δω 0 , such that a distance Δr o between a virtual crossover of the primary particle beam and the optical axis is in a predetermined range, and makes a field-of-view of the left and right stereo pair image of a sample surface coincident by compensating the tilt angle of the primary charged particle beam,

providing a tilting mechanism and using the tilting mechanism for tilting the sample on the sample table;

utilizing a tilted focus compensation function for compensating a focus of the objective lens and simultaneously compensating the tilt angle (ω 0 ) of the primary charged particle beam in response to a surface tilt of the sample on the sample table and using the aligner for compensating for a field-of-view deviation while the primary charged particle beam is scanned on one line on the sample;

adapting the charged particle beam device for acquiring a stereo pair image of the sample tilted by the tilting mechanism; and

increasing a first signal for the aligner, and decreasing a second signal for the objective lens as a function of the advancing of a deflection signal for the scan coil.

2. The image acquiring method of claim 1 , further including providing a tilted magnification compensation function for changing a scan width simultaneously with the focus compensation of the objective lens and the field-of-view deviation compensation due to the tilted primary charged particle beam and scanning the primary charged particle beam on the same region function as that of a case where the sample surface is not tilted.

3. The image acquiring method of claim 2 , further including providing an image display device, wherein the image display device displays a GUI screen including an input unit that is capable of performing at least one of the beam tilt field-of-view compensation, the tilted focus compensation, and the tilted magnification compensation.

4. The image acquiring method of claim 1 , further including providing the beam tilt field-of-view compensation function for compensating the tilt angle (ω 0 ), such that the predetermined range of the distance Δr o between the virtual crossover and the optical axis is ±200 μm or less.

5. The image acquiring method of claim 1 , further including using the scan coil for scanning the primary charged particle beam in a scan range equal to that before the tilt.

6. An image acquiring method including the steps of:

providing a charged particle source and emitting a charged particle beam using the charged particle source;

utilizing a plurality of convergent lenses for converging the charged particle beam along an optical axis of the charged particle beam device;

providing a scan coil for scanning the charged particle beam on a sample;

utilizing an objective lens for converging the charged particle beam on the sample;

providing a deflection system arranged above the objective lens for tilting the charged particle beam;

using the deflection system for forming a distance between a virtual crossover of the charged particle beam and the optical axis during tilting of the charged particle beam;

including a beam tilt field-of-view compensation function for compensating a tilt angle (ω 0 ) of the charged particle beam by a compensation angle Δω 0 , such that a distance Δr o between the virtual crossover of the primary charged particle beam and the optical axis is in a predetermined range;

providing a tilting mechanism and using the tilting mechanism for tilting the sample, and which forms a sample surface tilt;

using a tilted focus compensation function for compensating a focus of the objective lens as a function of the sample surface tilt and simultaneously using the beam tilt field-of-compensation function for compensating the tilt angle (ω 0 ) of the charged particle beam;

providing a processing unit which acquires a stereo pair image of the sample tilted by the tilting mechanism; and

increasing a first signal for the deflection system and decreasing a second signal for the objective lens as a function of the advancing of a deflection signal for the scan coil.

7. The image acquiring method of claim 6 , further including the beam tilt field-of-view compensation function for compensating the tilt angle (ω 0 ), such that the predetermined range of the distance Δr o between the virtual crossover and the optical axis is ±200 μm or less.

8. The image acquiring method of claim 6 , further comprising conducting a tilted magnification compensation by changing a scan range of the scan coil as a function of the tilted focus compensation function.