IP Library Granted Patent US 10,184,064
Granted Patent B2
US 10,184,064 · App. 13/983,726 · Granted Jan 22, 2019

Inorganic composition for transferring a fine unevenness

Inventor: Jun Koike (Tokyo, JP)
Assignee: ASAHI KASEI KABUSHIKI KAISHA
C09D143/04C08G77/56C08G77/58C08L83/04C08L83/14C09D183/06C09D185/04G02B5/1809G03F7/0002H01L31/0236H01L31/02168H01L31/02363H01L31/02366G02B2207/107Y02E10/50
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Quick Facts
Patent No.
US 10,184,064
App. No.
13/983,726
Granted
Jan 22, 2019
Kind
B2
Abstract

Disclosed is an inorganic composition for transferring a fine unevenness by which a fine unevenness made of an inorganic material capable of controlling a refractive index can be fabricated through a suitable transfer process. The composition according to the present invention contains a silicone compound and at least two types of metal alkoxides, wherein the metal alkoxides include a metal alkoxide having a metal species M1 (where M1 denotes at least one metal element selected from a group consisting of Ti, Zr, Zn, Sn, B, In, and Al) and a metal alkoxide having a metal species Si. In addition, a ratio between a molarity C M1 of the metal alkoxide having the metal species M1 and a molarity C Si of the metal alkoxide having the metal species Si in the inorganic composition for transferring a fine unevenness satisfies a condition of 0.2≤C M1 /C Si ≤24.

Claims (28)

1. An inorganic composition for transferring a fine unevenness comprising:

a silicone compound; and

at least two metal alkoxides, wherein

the metal alkoxides comprise a metal alkoxide having a metal species M1, where M1 denotes at least one metal element selected from a group consisting of Ti, Zr, Zn, Sn, B, In, and Al, and a metal alkoxide having a metal species Si,

a ratio (C M1 /C Si ) between a molarity (C M1 ) of the metal alkoxide having the metal species M1 and a molarity (C Si ) of the metal alkoxide having the metal species Si in the inorganic composition for transferring a fine unevenness satisfies a condition of Equation (1): 0.04≤C M1 /C Si ≤4.56, and

the inorganic composition is prepared by mixing said silicone compound and said at least two metal alkoxides.

2. An inorganic composition for transferring a fine unevenness comprising:

a silicone compound;

at least two metal alkoxides; and

an photopolymerization initiator, wherein

the metal alkoxides comprise a metal alkoxide having a metal species M1, where M1 denotes at least one metal element selected from a group consisting of Ti, Zr, Zn, Sn, B, In, and Al, and a metal alkoxide having a metal species Si,

the metal alkoxide having the metal species Si includes a metal alkoxide having any one of an acryl group, a methacryl group, an acryloyl group, a methacryloyl group, an acryloxy group, a methacryloxy group, a vinyl group, an epoxy group, or an oxetane group in a single molecule,

a ratio between a molarity C M1 of the metal alkoxide having the metal species M1 and a molarity C Si of the metal alkoxide having the metal species Si in the inorganic composition for transferring a fine unevenness satisfies a condition of Equation (2): 0.04≤C M1 /C Si ≤4.56, and

the inorganic composition is prepared by mixing said silicone compound and said at least two metal alkoxides.

3. An inorganic composition for transferring a fine unevenness comprising:

a silicone compound;

at least two metal alkoxides; and

a photoacid generator, wherein

the metal alkoxides comprise a metal alkoxide having a metal species M1, where M1 denotes at least one metal element selected from a group consisting of Ti, Zr, Zn, Sn, B, In, and Al, and a metal alkoxide having a metal species Si,

a ratio between a molarity C M1 of the metal alkoxide having the metal species M1 and a molarity C Si , of the metal alkoxide having the metal species Si in the inorganic composition for transferring a fine unevenness satisfies a condition of Equation (3): 0.04≤C M1 /C Si ≤4.56, and

the inorganic composition is prepared by mixing said silicone compound and said at least two metal alkoxides.

4. The inorganic composition for transferring a fine unevenness according to claim 1 , wherein at least any one of the silicone compound or the metal alkoxides includes an aryl group.

5. The inorganic composition for transferring a fine unevenness according to claim 4 , wherein the aryl group is bound with silicon (Si).

6. The inorganic composition for transferring a fine unevenness according to claim 1 , wherein the metal alkoxide is a partially condensed material.

7. The inorganic composition for transferring a fine unevenness according to claim 1 , further containing a fluorine-contained silane coupling agent.

8. The inorganic composition for transferring a fine unevenness according to claim 1 , wherein, when the composition is dissolved in a propylene glycol monomethyl ether solvent at a concentration of 3 weight %, and a small-angle X-ray scattering measurement using X-rays having a wavelength of 0.154 nm is performed for the solution, a radius of inertia computed by applying a Gunier plot to a result of the measurement is 5 nm or shorter.

9. The inorganic composition for transferring a fine unevenness according to claim 1 , wherein the metal alkoxides are condensed in a chain of —O-M1-O-M2-O-M3-O-M4-O—, where M1, M2, M3, and M4 denote metal elements, which are identical to each other or different from each other.

10. The inorganic composition for transferring a fine unevenness according to claim 1 , wherein the metal alkoxides are condensed into a general formula [—O-M-] n , where M =Ti or Si, and n ≥4.

Assignments (3)
MERGER AND CHANGE OF NAME Recorded Jun 1, 2017
From: ASAHI KASEI E-MATERIALS CORPORATION; ASAHI KASEI KABUSHIKI KAISHA
To: ASAHI KASEI KABUSHIKI KAISHA
Reel/Frame 042647/0023 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 25, 2013
From: ASAHI KASEI KABUSHIKI KAISHA
To: ASAHI KASEI E-MATERIALS CORPORATION
Reel/Frame 031475/0691 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 10, 2013
From: KOIKE, JUN
To: ASAHI KASEI KABUSHIKI KAISHA
Reel/Frame 031384/0845 →
Priority Claims (3)
JP 2011-137449 · Jun 21, 2011 · national
JP 2011-137604 · Jun 21, 2011 · national
JP 2011-137719 · Jun 21, 2011 · national
Continuity (1)
Related Publication 20140128542A1 · May 8, 2014