Device for detecting foreign matter and method for detecting foreign matter
View Patent ↗The present invention provides a device for detecting foreign matter and a method for detecting foreign matter to detect a foreign matter on a surface of an object such as a film of an electrode mixture etc. or a foreign matter contained in the object, thereby to improve the reliability of the object. By irradiating an object with a terahertz illumination light 100 (wavelength of 4 μm to 10 mm) and detecting a scattered light 660 from an electrode 10 as an example of the object by a scattered light detector 200 , a foreign matter on a surface of the electrode 10 or contained in the electrode 10 , for example, a metal foreign matter 720 , is detected. The electrode 10 is one in which electrode mixture layers 700 each including an active material 701 , conductive additive and a binder as components are coated on both surfaces of a collector 710 . The scattered light 660 results from a part of a transmitted light 656 reflected by the metal foreign matter 720.
1. A device for detecting foreign matter which detects the foreign matter buried in an object being a multi-particle structure,
comprising an illumination light generating unit which generates an illumination light to be irradiated to the object; and
a scattered light detection optical system including a scattered light detecting unit which detects scattered light from the object as a signal using a light receiving element,
wherein a wavelength of the illumination light ranges from 4 μm to 10 mm, and
wherein the scattered light detection optical system is arranged at a position facing a side of the object on which the illumination light is irradiated and at an angle where a specular reflected light from an interface existing inside the object does not enter and a ratio of an amount of scattered light from the multi-particle structure to an amount of scattered light from the foreign matter is minimized.
2. The device for detecting foreign matter according to claim 1 , further comprising:
a specular reflection light detecting unit which detects a specular reflected light from the object using a light receiving element; and
an analyzing unit which performs a calculation of a thickness of the object or a depth of the foreign matter contained in the object from the signal obtained by the specular reflection light detecting unit.
3. The device for detecting foreign matter according to claim 2 , further comprising a focal distance adjusting unit which adjusts a focal length of each of the scattered light and the specular reflected light.
4. The device for detecting foreign matter according to claim 2 , wherein the analyzing unit performs an analysis of components of the foreign matter or a detection of moisture contained in the object from the signal obtained by the specular reflection light detecting unit.
5. The device for detecting foreign matter according to claim 2 , further comprising a non-linear crystal device which converts the wavelength of at least one of the scattered light and the specular reflected light,
wherein at least one of the scattered light detection optical system and the specular reflection light detecting unit includes an infrared and visible light detector.
6. The device for detecting foreign matter according to claim 2 , wherein at least one of the scattered light detecting unit and the specular reflection light detection optical system includes a one-dimensional sensor or a two-dimensional sensor in which a plurality of sensors are arranged.
7. The device for detecting foreign matter according to claim 1 , further comprising a smoothing processing unit which smoothes the signal obtained by the scattered light detecting unit detection optical system; and
a filter processing unit which filters the smoothed signal smoothed in the smoothing processing unit.
8. The device for detecting foreign matter according to claim 7 , further comprising a manifestation processing unit which executes a differential processing of a noise removal signal obtained by the filter processing unit.
9. The device for detecting foreign matter according to claim 1 , further comprising:
a heterodyne which processes a signal obtained by the scattered light detection optical system; and
a lock-in amplifier.
10. The device for detecting foreign matter according to claim 1 , further comprising:
a synchronous detecting unit which processes a signal obtained by the scattered light detection optical system; and
a lock-in amplifier.
11. The device for detecting foreign matter according to claim 1 , further comprising a non-linear crystal device which converts the wavelength of the scattered light,
wherein the scattered light detection optical system includes an infrared and visible light detector.
12. The device for detecting foreign matter according to claim 1 , wherein the illumination light generating unit includes: a combination of femtosecond pulsed laser and a photoconductive antenna InGa electrostrictive element; a combination of nanosecond pulsed laser and a non-linear crystal device, a quantum cascade laser that generates a terahertz wave, a Schottky barrier diode that generates a terahertz wave, a Gunn diode or a TUNNETT diode.
13. The device for detecting foreign matter according to claim 1 , wherein the scattered light detection optical system includes a one-dimensional sensor or a two-dimensional sensor in which a plurality of sensors are arranged.
14. A method for detecting foreign matter which detects foreign matter buried in an object being a multi-particle structure, the method comprising the steps of:
irradiating the object with an illumination light; and
detecting a scattered light from the object as a signal by using a scattered light detection optical system,
wherein a wavelength of the illumination light ranges from 4 μm to 10 mm, and
wherein the scattered light detection optical system is arranged at a position facing a side of the object on which the illumination light is irradiated and at an angle where a specular reflected light from an interface existing inside the object does not enter and a ratio of an amount of a scattered light from the multi-particle structure to an amount of a scattered light form the foreign matter is minimized.
15. The method for detecting foreign matter according to claim 14 , further comprising a step of smoothing and filtering the signal of scattered light.
16. The method for detecting foreign matter according to claim 15 , further comprising a step of performing differential processing on the signal subjected to the filtering.
17. The method for detecting foreign matter according to claim 14 , further comprising a step of detecting a specular reflected light from the object.
18. The method for detecting foreign matter according to claim 17 , further comprising a step of adjusting a focal length of each of the scattered light and the specular reflected light.
19. The method for detecting foreign matter according to claim 17 , further comprising a step of performing a calculation of a thickness of the object or a depth of the foreign matter contained in the object, or an analysis of components of the foreign matter or a detection of moisture contained in the object from a signal obtained by detecting the specular reflected light.
20. The method for detecting foreign matter according to claim 17 , further comprising a step of converting the wavelength of at least one of the scattered light and the specular reflected light.
21. The method for detecting foreign matter according to claim 14 , further comprising a step of converting the wavelength of the scattered.