IP Library Granted Patent US 9,561,566
Granted Patent B2
US 9,561,566 · App. 13/985,386 · Granted Feb 7, 2017

Continuously scanning XY translation stage

Inventors: Matthew C. Putman (Brooklyn, NY); John B. Putman (Celebration, FL)
Assignee: Nanotronics Imaging, Inc.
B23Q1/48B23Q1/4828B23Q1/621G03F7/70716H01L21/68
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Quick Facts
Patent No.
US 9,561,566
App. No.
13/985,386
Granted
Feb 7, 2017
Kind
B2
Abstract

An XY translation stage includes a primary drive mechanism and a stage drive assembly. The primary drive mechanism rotates the stage drive assembly about an axis of rotation. The XY translation stage also includes an object stage that orbits freely in a defined plane without rotation of the object stage out of that defined plane. A stage pin associates the stage drive assembly with the object stage such that rotational movement of the stage drive assembly yields orbital movement of the object stage within the defined plane. The positioning of the stage pin relative to the axis of rotation is adjustable such that the diameter of the orbital movement of the object stage is adjustable.

Claims (20)

1. An XY translation stage comprising:

a primary drive mechanism;

a stage drive assembly, said primary drive mechanism rotating said stage drive assembly about an axis of rotation;

an object stage that orbits freely in a defined plane without rotation of said object stage out of said plane;

a stage pin associating said stage drive assembly with said object stage such that rotational movement of said stage drive assembly yields orbital movement of said object stage within said defined plane, wherein the positioning of said stage pin relative to said axis of rotation is adjustable such that the diameter of the orbital movement of said object stage is adjustable; and

a lead screw associated with said stage drive assembly to rotate therewith, said stage pin being threaded onto said lead screw such that rotation of said lead screw causes said stage pin to move along the length of said lead screw to occupy different positions relative to said axis of rotation of said stage drive assembly, wherein said lead screw extends over said axis of rotation, and said stage pin is positionable along said lead screw at all points from said axis of rotation to the ends of the lead screw.

2. The XY translation stage of claim 1 , further comprising:

an object stage through bore in said object stage;

a stage rod extending through said object stage through bore in a first direction and including a stage rod through bore; and

a guide rod extending through said stage rod through bore, said stage rod, said guide rod, said object stage through bore and said stage rod through bore serving to limit movement of said object stage such that said object stage orbits freely in a defined plane without rotation of said object stage out of said plane.

3. An XY translation stage comprising;

a primary drive mechanism;

a stage drive assembly, said primary drive mechanism rotating said stage drive assembly about an axis of rotation;

an object stage that orbits freely in a defined plane without rotation of said object stage out of said plane;

a stage pin associating said stage drive assembly with said object stage such that rotational movement of said stage drive assembly yields orbital movement of said object stage within said defined plane, wherein the positioning of said stage pin relative to said axis of rotation is adjustable such that the diameter of the orbital movement of said object stage is adjustable;

a lead screw associated with said stage drive assembly to rotate therewith, said stage pin being threaded onto said lead screw such that rotation of said lead screw causes said stage pin to move along the length of said lead screw to occupy different positions relative to said axis of rotation of said stage drive assembly, wherein said lead screw extends over said axis of rotation, and said stage pin is positionable along said lead screw at all points from the axis of rotation to the ends of the lead screw;

a lead screw bevel gear associated with said lead screw; and

a drive bevel gear that mates with said lead screw bevel gear, the lead screw bevel gear and drive bevel gear configured to interact during rotation of said lead screw, when said lead screw rotates with said stage drive assembly, the interaction of said lead screw bevel gear and said drive bevel gear serving to rotate said lead screw and thereby cause said stage pin to move along the length of said lead screw.

4. The XY translation stage of claim 3 , wherein said drive bevel gear is stationary and includes a discrete set of bevel gear cogs, said lead screw bevel gear interacting with said drive bevel gear, through said discrete set of bevel gear cogs, once during a single rotation of said stage drive assembly and said stage pin moves a discrete distance due to said interaction.

5. The XY translation stage of claim 3 , wherein said drive bevel gear is stationary and provides a complete ring of bevel gear cogs such that said lead screw bevel gear interacts with said drive bevel gear, through said bevel gear cogs, at all times during rotation of said stage drive assembly and said stage pin moves continuously along the length of said lead screw due to said interaction.

Assignments (3)
SECURITY INTEREST Recorded Nov 30, 2023
From: NANOTRONICS IMAGING, INC.; NANOTRONICS HEALTH LLC; CUBEFABS INC.
To: ORBIMED ROYALTY & CREDIT OPPORTUNITIES IV, LP
Reel/Frame 065726/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 31, 2017
From: PUTMAN, MATTHEW C.
To: NANOTRONICS IMAGING, INC.
Reel/Frame 041132/0963 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 14, 2013
From: PUTMAN, MATTHEW C; PUTMAN, JOHN B
To: NANOTRONICS IMAGING, LLC
Reel/Frame 031013/0941 →
Continuity (1)
Related Publication 20140027967A1 · Jan 30, 2014