Nanowire structures having non-discrete source and drain regions
View Patent ↗Nanowire structures having non-discrete source and drain regions are described. For example, a semiconductor device includes a plurality of vertically stacked nanowires disposed above a substrate. Each of the nanowires includes a discrete channel region disposed in the nanowire. A gate electrode stack surrounds the plurality of vertically stacked nanowires. A pair of non-discrete source and drain regions is disposed on either side of, and adjoining, the discrete channel regions of the plurality of vertically stacked nanowires.
1. A semiconductor device, comprising:
a plurality of vertically stacked nanowires disposed above a substrate, each of the nanowires comprising a discrete channel region disposed in the nanowire;
a gate electrode stack surrounding the plurality of vertically stacked nanowires;
a pair of non-discrete source and drain regions disposed on either side of, and adjoining, the discrete channel regions of the plurality of vertically stacked nanowires; and
a pair of spacers disposed between the gate electrode stack and the pair of non-discrete source and drain regions, wherein a portion of the plurality of vertically stacked nanowires under one or both of the spacers is non-discrete.
2. The semiconductor device of claim 1 , further comprising:
a pair of contacts, each contact disposed on one of the pair of non-discrete source and drain regions.
3. The semiconductor device of claim 2 , wherein each contact completely surrounds the respective non-discrete source or drain region.
4. The semiconductor device of claim 2 , wherein each contact only partially surrounds the respective non-discrete source or drain region.
5. The semiconductor device of claim 1 , wherein the pair of non-discrete source and drain regions is a pair of semiconductor regions comprising a first same semiconductor material as the discrete channel regions and a second, different, semiconductor material.
6. The semiconductor device of claim 5 , wherein the first and second semiconductor materials are merged, the semiconductor regions further comprising a dopant species.
7. The semiconductor device of claim 6 , wherein the first semiconductor material is silicon germanium, the second semiconductor material is silicon, and the dopant species is a P-type dopant species.
8. The semiconductor device of claim 6 , wherein the first semiconductor material is silicon, the second semiconductor material is silicon germanium, and the dopant species is an N-type dopant species.
9. The semiconductor device of claim 5 , wherein, from a cross-sectional perspective orthogonal to the length of the discrete channel regions, each of the pair of non-discrete source and drain regions is approximately rectangular in shape.
10. The semiconductor device of claim 1 , wherein the pair of non-discrete source and drain regions is a pair of semiconductor regions comprising a first same semiconductor material as the discrete channel regions and a second, faceted, semiconductor material at least partially surrounding the first semiconductor material.
11. The semiconductor device of claim 10 , wherein the first and second semiconductor materials are the same.
12. The semiconductor device of claim 1 , wherein the pair of non-discrete source and drain regions provides contact to the plurality of vertically stacked nanowires.
13. The semiconductor device of claim 12 , wherein the pair of non-discrete source and drain regions consists essentially of metal.
14. The semiconductor device of claim 1 , wherein the gate electrode stack comprises a metal gate and a high-K gate dielectric, and each of the nanowires comprises silicon, germanium, or a combination thereof.
15. A semiconductor device, comprising:
a plurality of vertically stacked nanowires disposed above a substrate, each of the nanowires comprising a discrete channel region disposed in the nanowire;
a gate electrode stack surrounding the plurality of vertically stacked nanowires; and
a pair of non-discrete source and drain regions disposed on either side of, and adjoining, the discrete channel regions of the plurality of vertically stacked nanowires, wherein the pair of non-discrete source and drain regions is a pair of semiconductor regions comprising a first same semiconductor material as the discrete channel regions and a second, faceted, semiconductor material completely surrounding the first semiconductor material.
16. The semiconductor device of claim 15 , further comprising:
a pair of contacts, each contact disposed on one of the pair of non-discrete source and drain regions.
17. The semiconductor device of claim 15 , wherein the gate electrode stack comprises a metal gate and a high-K gate dielectric, and each of the nanowires comprises silicon, germanium, or a combination thereof.