Methods to enhance doping concentration in near-surface layers of semiconductors and methods of making same
View Patent ↗A die includes a semiconductive prominence and a surface-doped structure on the prominence. The surface-doped structure makes contact with contact metallization. The prominence may be a source- or drain contact for a transistor. Processes of making the surface-doped structure include wet-vapor- and implantation techniques, and include annealing techniques to drive in the surface doping to only near-surface depths in the semiconductive prominence.
1. A contact on a semiconductive prominence, comprising:
a group IV semiconductive substrate;
a prominence disposed on the semiconductive substrate, wherein the prominence is a group IV semiconductor;
a surface-doped structure comprising a III-V material on the prominence, wherein the III-V material has a larger lattice constant than the group IV semiconductor of the prominence at the interface of the III-V material and the group IV semiconductor of the prominence, wherein the surface-doped structure has a first concentration of a dopant and the prominence has a second concentration of the dopant, and wherein the first concentration of the dopant is different than the second concentration of the dopant; and
a contact metallization having a contact metallization contact area coupled to the surface-doped structure, wherein the prominence has a prominence form factor, and wherein the contact metallization contact area reflects the prominence form factor.
2. The contact of claim 1 , wherein the prominence is a first prominence, further including a second prominence, wherein the first- and second prominences are source- and drain contacts of a transistor.
3. The contact of claim 1 , wherein the prominence is a first prominence, further including a second prominence, wherein the first- and second prominences are source- and drain contacts of a transistor that are spaced apart by a gate structure.
4. The contact of claim 1 , wherein the prominence is a first prominence, further including a second prominence, wherein the first- and second prominences are source- and drain contacts of a transistor that are spaced apart by a gate structure, and further including a contact interconnect is disposed in a first interconnect ILD layer, wherein the contact interconnect contacts the contact metallization.
5. The contact of claim 1 , wherein the III-V material affects Schottky barrier height reduction of the prominence.
6. The contact of claim 1 , wherein III-V material forms a PMOS interlayer that affects Schottky barrier height reduction of the prominence.
7. The contact of claim 1 , wherein the III-V material forms an NMOS interlayer that affects Schottky barrier height reduction of the prominence.
8. The contact of claim 1 , wherein the contact metallization contacts the surface-doped structure.
9. The contact of claim 1 , wherein the surface-doped structure on the prominence has a transition zone adjacent the prominence and a dopant-rich zone adjacent the contact metallization.
10. The contact of claim 1 , wherein the surface-doped structure on the prominence has a transition zone adjacent the prominence, a dopant-rich zone adjacent the contact metallization, and a transition zone between the transition zone and the dopant-rich zone.
11. The contact of claim 1 wherein the prominence is silicon based.
12. A computer system comprising:
a group IV semiconductive substrate of a die;
a prominence disposed on the semiconductive substrate, wherein the prominence is a group IV semiconductor;
a surface-doped structure comprising a III-V material on the prominence, wherein the III-V material has a larger lattice constant than the group IV semiconductor of the prominence at the interface of the III-V material and the group IV semiconductor of the prominence, wherein the surface-doped structure has a first concentration of a dopant and the prominence has a second concentration of the dopant, and wherein the first concentration of the dopant is different than the second concentration of the dopant; and
a contact metallization having a contact metallization contact area coupled to the surface-doped structure, wherein the prominence has a prominence form factor, and wherein the contact metallization contact area reflects the prominence form factor; and
a foundation substrate that supports the die.
13. The computer system of claim 12 , wherein the foundation substrate is part of a device selected from the group consisting of mobile device, a smartphone device, a tablet computer device, a vehicle, and a television.
14. The computer system of claim 12 , wherein the die is a first die and further including a subsequent integrated circuit of a second die that is packaged with the first die.
15. The computer system of claim 12 , wherein the die includes the prominence in a logic first sector, and wherein the die has a graphics second sector with a subsequent integrated circuit.