Liquid-discharging device with observation optical system
In a liquid discharging device, an objective optical system is moved in the optical axis direction by a focus position adjusting mechanism to perform a first focusing action relative to the tip of a liquid discharging nozzle or a mirror image thereof and a second focusing action relative to the surface of a substrate facing the liquid discharging nozzle, the distance between the nozzle tip and the surface of the substrate is calculated on the basis of the resulting focus positions, and the position of the liquid discharging nozzle is adjusted by nozzle position adjusting mechanism so that the gap is appropriate. According to this configuration, the distance between the nozzle tip and the surface of the substrate can be precisely calculated and an optical unit for observation can be focused on the surface of the substrate.
1. A liquid-discharging device with an observation optical system comprising:
a liquid-discharging mechanism having a nozzle configured to discharge a liquid material;
an objective optical a system configured to observe, in magnification, a discharge target disposed opposite a tip of the nozzle;
display means for displaying an optical image obtained by the objective optical system;
a focal point position adjustment mechanism configured to adjust a focal point position of the objective optical system;
a nozzle position adjustment mechanism configured to move, along at least a direction of an optical axis of the objective optical system, the nozzle relative to the objective optical system; and
a control unit configured to control the liquid-discharging mechanism, the focal point position adjustment mechanism, and the nozzle position adjustment mechanism;
the control unit programmed to perform a first focusing action aligning focal point position of the objective optical system to the tip of the nozzle or a mirror image thereof and a second focusing action aligning the focal point position of the objective optical system to a surface of the discharge target, and calculating a distance between the tip of the nozzle and the surface of the discharge target on the basis of results of implementing the first and second focusing actions.
2. The liquid-discharging device with the observation optical system according to claim 1 , wherein
the control unit performs the first focusing action aligning the focal point position of the objective optical system onto the mirror image of the tip of the nozzle reflected on a mirror disposed opposite the tip of the discharging nozzle, the second focusing action, and a third focusing action for aligning the focal point position of the objective optical system on a predetermined pattern formed on a surface of the mirror; and
the control unit calculates the distance between the tip of the nozzle and the surface of the discharge target on the basis of the results of implementing the first, second, and third focusing actions.
3. The liquid-discharging device having the observation optical system according to claim 1 , wherein
the nozzle and the objective optical system are coaxially disposed.
4. The liquid-discharging device having the observation optical system according to claim 1 , wherein
the nozzle position adjustment mechanism is configure to move the nozzle along an arbitrary direction on a plane orthogonal to the optical axis of the objective optical system.
5. The liquid-discharging device having the observation optical system according to claim 1 , wherein
the liquid-discharging mechanism has voltage application means for applying a pulse voltage on a liquid in a tip opening of the nozzle and a counter electrode disposed on a rear-surface side of the discharge target,
the voltage application means energizes the liquid in the tip opening of the nozzle and generates an electrostatic suction force acting towards the counter electrode, and
the electrostatic suction force causes the liquid to be discharged from the tip opening of the nozzle.
6. The liquid-discharging device having the observation optical system according to claim 1 , further comprising:
irradiation means for irradiating the discharge target with at least one of illumination light, measurement light, and process light, the irradiation means performing irradiation using a light path of the objective optical system.