Photo-patternable and developable silsesquioxane resins for use in device fabrication
View Patent ↗A coatable resin solution capable of forming a coating when applied to the surface of a substrate that is photo-patternable and developable as a dielectric material upon exposure to ultraviolet radiation is provided. The resin solution comprises a silsequioxane-based (SSQ-based) resin, at least one initiator, and an organic solvent. The SSQ-based resin includes both a hydride component and at least one photo-curable component. The resulting coating exhibits a dielectric constant that is less than or equal to about 3.5.
1. A coatable resin solution for forming a coating on a substrate, such as a wafer or electronic device, the resin solution comprising:
a silsequioxane-based resin comprising a hydride component present in a mole fraction between 0.40 to 0.90 and at least one photo-curable component up to a mole fraction of 0.40 for the photo-curable component, the hydride component characterized by units of —(HSiO 3/2 )—; the photo-curable component characterized by units of —(R 1 SiO 3/2 )—, where R 1 is an organic photocurable group;
at least one initiator selected as one from the group of a free-radical initiator, a cationic initiator, and a combination or mixture thereof; and
an organic solvent;
wherein the resin solution is capable of forming a coating when applied to the surface of a substrate that is photo-patternable and developable as a dielectric material upon exposure to ultraviolet radiation;
wherein the silsesquioxane-based resin does not further comprise an organo-siloxane component characterized by units of —(R 2 SiO 3/2 )—, where R 2 is an organic group.
2. The resin solution of claim 1 , wherein R 1 is selected as one from the group of an epoxy group, an acrylate group, a vinylether group, a vinyl group, and a mixture or combination thereof.
3. The resin solution of claim 2 , wherein R 1 is an epoxycyclohexylethyl group, a glycidoxypropyl group, or a methacryloxypropyl group.
4. The resin solution of claim 1 , wherein the initiator is one selected from the group of a photo-radical generator (PRG), a photo-acid generator (PAG), and a mixture or combination thereof.
5. The resin solution of claim 4 , wherein the initiator is one selected from the group of p-isopropylphenyl)(p-methylphenyl)iodonium tetrakis(pentafluoro-phenyl)borate and an amino ketone.
6. The resin solution of claim 1 , wherein the organic solvent is one selected from the group of iso-butanol (i-BuOH), propylene glycol 1-monobutyl ether (PGBE), and propylene glycol methyl ethyl acetate (PGMEA).
7. The resin solution of claim 1 , wherein the weight percentage of the silsesquioxane resin in the solution is about 10 wt. % or more.
8. The resin solution of claim 1 , wherein the weight percentage of the initiator in the resin solution is within the range of about 0.5 wt. % to about 3.5 wt. %.
9. A coatable resin solution for forming a coating on a substrate, such as a wafer or electronic device, the resin solution comprising:
a silsequioxane-based resin comprising a hydride component present in a mole fraction between 0.40 to 0.90 and at least one photo-curable component up to a mole fraction of 0.40 for the photo-curable component, the hydride component characterized by units of —(HSiO 3/2 )—; the photo-curable component characterized by units of —(R 1 SiO 3/2 )—, where R 1 is an organic photocurable group;
at least one initiator selected as one from the group of a free-radical initiator, a cationic initiator, and a combination or mixture thereof; and
an organic solvent;
wherein the resin solution is capable of forming a coating when applied to the surface of a substrate that is photo-patternable and developable as a dielectric material upon exposure to ultraviolet radiation;
wherein the silsesquioxane-based resin further comprises an organo-siloxane component, the organo-siloxane component being characterized by units of —(R 2 SiO 3/2 )—, where R 2 is a polyethylene glycol group.