Mechanisms for forming image sensor device
Embodiments of mechanisms for forming an image sensor device are provided. The image sensor device includes a semiconductor substrate and one photodetector formed in the semiconductor substrate. The image sensor device also includes one gate stack formed over the semiconductor substrate. The gate stack includes multiple polysilicon layers.
1. An image sensor device, comprising:
a semiconductor substrate;
at least one photodetector formed in the semiconductor substrate;
isolation regions surrounding the photodetector; and
at least one gate stack formed over the semiconductor substrate, wherein the at least one gate stack comprises a plurality of polysilicon layers, and the polysilicon layers together form a gate electrode of a transistor.
2. The image sensor device as claimed in claim 1 , further comprising at least one interface formed between the polysilicon layers.
3. The image sensor device as claimed in claim 1 , wherein an average grain size of one of the polysilicon layers is in a range from about 3 nm to about 12 nm.
4. The image sensor device as claimed in claim 1 , wherein thicknesses of the polysilicon layers are substantially the same.
5. The image sensor device as claimed in claim 1 , wherein thicknesses of the polysilicon layers are different from each other.
6. The image sensor device as claimed in claim 1 , wherein thicknesses of some of the polysilicon layers are different from each other.
7. The image sensor device as claimed in claim 1 , wherein average grain sizes of the polysilicon layers are different from each other.
8. The image sensor device as claimed in claim 1 , wherein average grain sizes of the polysilicon layers are substantially the same.
9. The image sensor device as claimed in claim 1 , wherein a ratio of an average grain size of one of the polysilicon layers to a thickness of the corresponding one of the polysilicon layers is in a range from about 0.03 to about 0.4.
10. The image sensor device as claimed in claim 1 , wherein the photodetector comprises a light-sensing region, the light-sensing region is an n-type doped region, and the isolation regions are p-type doped regions, and a part of the isolation regions is directly below the at least one gate stack.
11. The image sensor device as claimed in claim 1 , wherein two of the polysilicon layers are in direct contact with each other.
12. An image sensor device, comprising:
a semiconductor substrate;
a light-sensing region formed in the semiconductor substrate;
a floating diffusion region formed in the semiconductor substrate;
isolation regions surrounding the light-sensing region; and
a gate stack interposing the light-sensing region and the floating diffusion region, wherein the gate stack comprises a stack of a plurality of semiconductor layers, and the semiconductor layers together form a gate electrode of a transistor.
13. The image sensor device as claimed in claim 12 , wherein the semiconductor layers are polysilicon layers.
14. The image sensor device as claimed in claim 12 , an average grain size of one of the semiconductor layers is in a range from about 3 nm to about 12 nm.
15. The image sensor device as claimed in claim 12 , wherein a ratio of an average grain size of one of the semiconductor layers to a thickness of the corresponding one of the polysilicon layers is in a range from about 0.03 to about 0.4.
16. The image sensor device as claimed in claim 12 , wherein thicknesses of the semiconductor layers are substantially the same.
17. The image sensor device as claimed in claim 12 , wherein thicknesses of the semiconductor layers are different from each other.
18. The image sensor device as claimed in claim 12 , wherein thicknesses of some of the semiconductor layers are different from each other.
19. The image sensor device as claimed in claim 12 , wherein average grain sizes of the semiconductor layers are different from each other.
20. The image sensor device as claimed in claim 12 , wherein average grain sizes of the semiconductor layers are substantially the same.
21. The image sensor as claimed in claim 12 , further comprising a pinned layer on the light sensing region, wherein the pinned layer and the light sensing region form a photodetector, a portion of the light sensing region is between the pinned layer and the floating diffusion region, and the pinned layer has a conductivity type different from that of the light sensing region and that of the floating diffusion region.
22. The image sensor device as claimed in claim 12 , wherein a part of the isolation regions is directly below the gate stack.