SUBSTRATE HOLDER ASSEMBLY FOR CONTROLLED LAYER TRANSFER
A substrate holder assembly for use in a controlled spalling process is provided. The substrate holder assembly includes a base structure having a surface in which a base substrate or other work piece can be placed thereupon. A framing element is located above and spaced apart from the surface of the base structure. The framing element has a window which exposes an upper surface of the base substrate and defines an area of the upper surface of the base substrate in which another material can be applied thereto. A support structure containing at least one mechanical securing element is located on the framing element. The support structure mechanically constrains the base substrate within the substrate holder assembly. Each mechanical securing element contacts at least one surface of the support structure and, optionally, one surface of the base substrate.
1 . A substrate holder assembly comprising:
a base structure having a surface in which a work piece can be placed thereupon;
a framing element located above and spaced apart from the surface of the base structure by a thickness of the work piece, said framing element having a window which exposes an upper surface of the work piece; and
a support structure containing at least one mechanical securing element and located on the framing element, wherein the at least one mechanical securing element contacts at least one surface of the support structure.
2 . The substrate holder assembly of claim 1 , wherein said support structure is a vacuum chuck containing a plurality of vacuum through holes.
3 . The substrate holder assembly of claim 1 , wherein said support structure is an electrostatic chuck.
4 . The substrate holder assembly of claim 1 , wherein said framing element comprises a stainless steel sheet.
5 . The substrate holder assembly of claim 1 , wherein said framing element comprises a conductive elastomer.
6 . The substrate holder assembly of claim 5 , wherein said conductive elastomer is anisotropically conductive.
7 . The substrate holder assembly of claim 1 , wherein said at least one mechanical securing element comprises a screw, a clamp, a magnetic, a gravitational device or a pressure based securing element.
8 . The substrate holder assembly of claim 1 , wherein said substrate holder assembly further comprises a compliant material located on the surface of the base structure.
9 . The substrate holder assembly of claim 8 , wherein said compliant material comprises an elastomer having a Young's modulus less than the Young's modulus of the support structure.
10 . The substrate holder assembly of claim 9 , wherein said elastomer is selected from the group consisting of a rubber, a silicone, a polyolefin, polyvinylactetate, polymethyl acrylate, a viscoelastic gel, and a foam.
11 . The substrate holder assembly of claim 8 , wherein said elastomer is a tape.