Two step method of rapid curing a semiconductor polymer layer
A semiconductor device and method of making the semiconductor device is described. A semiconductor die is provided. A polymer layer is formed over the semiconductor die. A via is formed in the polymer layer. The polymer layer is crosslinked in a first process. The polymer layer is thermally cured in a second process. The polymer layer can comprise polybenzoxazoles (PBO), polyimide, benzocyclobutene (BCB), or siloxane-based polymers. A surface of the polymer layer can be crosslinked by a UV bake to control a slope of the via during subsequent curing. The second process can further comprise thermally curing the polymer layer using conduction, convection, infrared, or microwave heating. The polymer layer can be thermally cured by increasing a temperature of the polymer at a rate greater than or equal to 10 degrees Celsius per minute, and can be completely cured in less than or equal to 60 minutes.
1. A method of making a semiconductor device, comprising:
providing a semiconductor die;
forming a polymer layer over the semiconductor die;
forming a via in the polymer layer;
crosslinking a surface of the polymer layer in a first process, after forming the via, by exposing the polymer layer to ultraviolet (UV) radiation at an elevated temperature in a range of 100-200 degrees Celsius for a time less than or equal to 3 minutes; and
thermally curing the polymer layer by heating the polymer layer at temperatures greater than or equal to 200 degrees Celsius for a time of less than 15 minutes in a second process that occurs after the first process.
2. The method of claim 1 , further comprising forming the polymer layer as a layer of polybenzoxazoles (PBO), polyimide, benzocyclobutene (BCB), siloxane-based polymer, or epoxy-based polymers.
3. The method of claim 1 , further comprising exposing the polymer layer to UV radiation to crosslink the surface of the polymer layer in the first process to subsequently control a slope of the via during the second process.
4. The method of claim 1 , further comprising thermally curing the polymer layer in the second process by using at least one thermal process selected from the group consisting of conduction, convection, infrared, and microwave heating.
5. The method of claim 1 , further comprising thermally curing the polymer layer by increasing a temperature of the polymer layer at a rate greater than or equal to 10 degrees Celsius per minute.
6. The method of claim 1 , further comprising completely thermally curing the polymer layer, comprising a temperature ramp up, a peak temperature dwell, a temperature ramp down, and a complete thermal anneal, in a time of less than or equal to 60 minutes.
7. The method of claim 2 , further comprising forming the polymer layer as a permanent portion of the semiconductor device.
8. The method of claim 1 , further comprising thermally curing the polymer layer in a low O 2 environment in which O 2 comprises less than or equal to 100 parts per million of the low O 2 environment.
9. The method of claim 1 , further comprising forming a witness mark as a discontinuity in a slope of the via along a portion of the via.