Magnetic recording medium fabrication method and apparatus
View Patent ↗A method of fabricating a magnetic recording medium sequentially forms a magnetic recording layer, a protection layer, and a lubricant layer on a stacked body. The stacked body is enclosed in a transfer container unit without exposing the stacked body to atmosphere after forming the protection layer on the stacked body by a deposition apparatus, and the transfer container unit is transported to a vapor-phase lubrication deposition apparatus. The stacked body is removed from the transfer container unit without exposing the stacked body to the atmosphere, in order to form the lubricant layer on the stacked body within the vapor-phase lubrication deposition apparatus.
1. A method of fabricating a magnetic recording medium by sequentially forming a magnetic recording layer, a protection layer, and a lubricant layer on a stacked body, comprising:
enclosing the stacked body in a transfer container unit without exposing the stacked body to atmosphere after forming the protection layer on the stacked body by a deposition apparatus;
transporting the transfer container unit that is detachably connected to the deposition apparatus by
disconnecting the transfer container unit from the deposition apparatus,
transporting the transfer container unit disconnected from the deposition apparatus to a vapor-phase lubrication deposition apparatus that is provided separately and independently of the deposition apparatus, and
detachably connecting the transfer container unit to the vapor-phase lubrication deposition apparatus; and
removing the stacked body enclosed within the transfer container unit from the transfer container unit without exposing the stacked body to the atmosphere, and forming the lubricant layer on the stacked body within the vapor-phase lubrication deposition apparatus by vapor-phase lubrication,
wherein the transfer container unit includes a transfer container configured to enclose the stacked body, an auxiliary chamber configured to detachably connect to the deposition apparatus and the vapor-phase lubrication deposition apparatus, and a gate valve configured to connect the transfer container and the auxiliary chamber.
2. The method of fabricating the magnetic recording medium as claimed in claim 1 , wherein an inside of the transfer container unit is vacuum.
3. The method of fabricating the magnetic recording medium as claimed in claim 1 , wherein an inside of the transfer container unit is an inert gas atmosphere.
4. The method of fabricating the magnetic recording medium as claimed in claim 3 , wherein an inert gas pressure inside the transfer container unit is in a range of 10 Pa to 200 Pa.
5. The method of fabricating the magnetic recording medium as claimed in claim 1 , wherein the transporting transports the transfer container unit disconnected from the deposition apparatus to the vapor-phase lubrication deposition apparatus by a transport apparatus that is provided between the deposition apparatus and the vapor-phase lubrication deposition apparatus.