Phase change current density control structure
View Patent ↗A phase change memory element and method of forming the same. The memory element includes first and second electrodes. A first layer of phase change material is between the first and second electrodes. A second layer including a metal-chalcogenide material is also between the first and second electrodes and is one of a phase change material and a conductive material. An insulating layer is between the first and second layers. There is at least one opening in the insulating layer providing contact between the first and second layers.
1. A processor system comprising:
a processor; and
a memory device coupled to the processor and comprising a memory element, the memory element comprising:
a first electrode,
a second electrode;
a first phase change material between the first and second electrodes,
a second metal-chalcogenide material between the first and second electrodes, and
an insulating layer between the first and second materials, at least one opening in the insulating layer providing contact between the first and second materials;
wherein the at least one opening area is smaller than the surface area of at least one of the first and second electrodes to increase current density during an operation of the memory element.
2. The system of claim 1 , wherein the first material comprises a chalcogenide material.
3. The system of claim 2 , wherein the first material comprises germanium-telluride.
4. The system of claim 1 , wherein the first material has a thickness of about 300 Å to about 500 Å.
5. The system of claim 1 , wherein the second material comprises a metal-chalcogenide material.
6. The system of claim 5 , wherein the second material comprises tin-telluride.
7. The system of claim 1 , wherein the second material has a thickness of about 500 Å to about 700 Å.
8. The system of claim 1 , wherein the at least one opening is at least partially directly above the second electrode.
9. The system of claim 1 , wherein the insulating layer comprises amorphous carbon.
10. The system of claim 1 , wherein at least one of the first and second electrodes comprise tungsten.
11. The system of claim 1 , wherein the at least one opening comprises at least two openings.
12. The system of claim 1 , wherein the current density is used to change the phase of at least a portion of one or more of the first material, the second material, or an interface between the first and second materials.