Sidewalls of electroplated copper interconnects
A structure including a seed layer located directly on top of and conformal to the diffusion barrier, wherein the seed layer is parallel to the sidewall and bottom of the opening, the seed layer comprises a crystalline structure suitable for plating copper; a first intermetallic compound and an alloy layer parallel to the sidewall of the opening and separating the seed layer from the conductive material, the first intermetallic compound is a precipitate within a solid solution of an alloying material of the alloy layer and the conductive material, and is molecularly bound to both the alloy layer and the conductive material, and a first high friction interface located between the seed layer and the alloy layer extending in a direction parallel to the sidewall of the opening, wherein the first high friction interface results in a mechanical bond between the seed layer and the alloy layer.
1. A structure formed in an opening, the opening having a sidewall defined by a non-metallic material and having a bottom defined by the non-metallic material, the structure comprising a diffusion barrier covering the sidewall and bottom, and a fill composed of a conductive material, the structure comprising:
a seed layer located directly on top of and conformal to the diffusion barrier, wherein the seed layer is parallel to the sidewall and bottom of the opening, the seed layer comprises a crystalline structure suitable for plating copper;
a first intermetallic compound and an alloy layer parallel to the sidewall of the opening and separating the seed layer from the conductive material, the diffusion barrier is in direct contact with the seed layer, the seed layer is in direct contact with the alloy layer, the alloy layer is in direct contact with the first intermetallic compound, and the first intermetallic compound is in direct contact with the conductive material, the first intermetallic compound is a precipitate within a solid solution of an alloying material of the alloy layer and the conductive material, and is molecularly bound to both the alloy layer and the conductive material, the alloying material excludes the conductive material and comprises at least one of the materials selected from the group consisting of chromium, tin, nickel, magnesium, cobalt, aluminum, manganese, titanium, zirconium, indium, palladium, silver, and combinations thereof; and
a boundary between the seed layer and the alloy layer extending in a direction parallel to the sidewall of the opening, the boundary comprises extremely close contact between the seed layer and the alloy layer such that a high friction interface is created.
2. The structure of claim 1 , wherein the alloying material is chromium.
3. The structure of claim 1 , wherein the conductive material is selected from the group consisting of copper, aluminum, and tungsten.
4. The structure of claim 1 , further comprising:
an electrically insulating liner located between the nonmetallic material and the diffusion barrier, and parallel to the bottom and sidewall of the opening.
5. The structure of claim 1 , further comprising:
a second intermetallic compound located between the seed layer and the first intermetallic compound, and parallel to the sidewall of the opening, the second intermetallic compound is a precipitate within a solid solution of a seed layer material from the seed layer and the alloying material and is molecularly bound to both the seed layer and the first intermetallic compound the boundary, and as such the high friction interface, between the seed layer and the alloy layer no longer exist.
6. The structure of claim 5 , further comprising:
an alloy layer located between the first intermetallic compound and the second intermetallic compound, and parallel to the sidewall of the opening, wherein the alloy layer comprises only the alloying material and is molecularly bound to both the first intermetallic compound and the second intermetallic compound.
7. A structure formed in an opening, the opening having a sidewall defined by a non-metallic material and having a bottom defined by the non-metallic material, the structure comprising a diffusion barrier covering the sidewall and bottom, and a fill composed of a conductive material, the structure comprising:
a seed layer located directly on top of and conformal to the diffusion barrier, wherein the seed layer is parallel to the sidewall and bottom of the opening, the seed layer comprises a crystalline structure suitable for plating copper;
a first intermetallic compound and a second intermetallic compound parallel to the sidewall of the opening and separating the seed layer from the conductive material, the diffusion barrier is in direct contact with the seed layer, the seed layer is in direct contact with the second intermetallic compound, the second intermetallic compound is in direct contact with the first intermetallic compound, and the first intermetallic compound is in direct contact with the conductive material, the first intermetallic compound is a precipitate within a solid solution of an alloying material and the conductive material, and is molecularly bound to both the second intermetallic compound and the conductive material, the second intermetallic compound is a precipitate within a solid solution of a seed layer material of the seed layer and the alloying material, and is molecularly bound to both the seed layer and the first intermetallic compound, the alloying material excludes the conductive material and comprises at least one of the materials selected from the group consisting of chromium, tin, nickel, magnesium, cobalt, aluminum, manganese, titanium, zirconium, indium, palladium, silver, and combinations thereof.
8. The structure of claim 7 , wherein the alloying material is chromium.
9. The structure of claim 7 , wherein the conductive material is selected from the group consisting of copper, aluminum, and tungsten.
10. The structure of claim 7 , further comprising:
an electrically insulating liner located between the nonmetallic material and the diffusion barrier, and parallel to the bottom and sidewall of the opening.
11. A structure formed in an opening, the opening having a sidewall defined by a non-metallic material and having a bottom defined by the non-metallic material, the structure comprising a diffusion barrier covering the sidewall and bottom, and a fill composed of a conductive material, the structure comprising:
a seed layer located directly on top of and conformal to the diffusion barrier, wherein the seed layer is parallel to the sidewall and bottom of the opening, the seed layer comprises a crystalline structure suitable for plating copper;
a first intermetallic compound, an alloy layer, and a second intermetallic compound parallel to the sidewall of the opening and separating the seed layer from the conductive material, the diffusion barrier is in direct contact with the seed layer, the seed layer is in direct contact with the second intermetallic compound, the second intermetallic compound is in direct contact with the alloy layer, the alloy layer is in direct contact with the first intermetallic compound, and the first intermetallic compound is in direct contact with the conductive material, the first intermetallic compound is a precipitate within a solid solution of an alloying material of the alloy layer and the conductive material, and is molecularly bound to both the alloy layer and the conductive material, the second intermetallic compound is a precipitate within a solid solution of a seed layer material of the seed layer and the alloying material of the alloy layer, and is molecularly bound to both the seed layer and the alloy layer, the alloying material excludes the conductive material and comprises at least one of the materials selected from the group consisting of chromium, tin, nickel, magnesium, cobalt, aluminum, manganese, titanium, zirconium, indium, palladium, silver, and combinations thereof.
12. The structure of claim 11 , wherein the alloying material is chromium.
13. The structure of claim 11 , wherein the conductive material is selected from the group consisting of copper, aluminum, and tungsten.
14. The structure of claim 11 , further comprising:
an electrically insulating liner located between the nonmetallic material and the diffusion barrier, and parallel to the bottom and sidewall of the opening.