IP Library Granted Patent US 9,171,988
Granted Patent B2
US 9,171,988 · App. 14/047,643 · Granted Oct 27, 2015

Photoconductive switch package

Inventor: George J Caporaso (Livermore, CA)
Assignee: Lawrence Livermore National Security, LLC
H01L31/16H01L31/09Y10T29/49105
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Quick Facts
Patent No.
US 9,171,988
App. No.
14/047,643
Granted
Oct 27, 2015
Kind
B2
Abstract

A photoconductive switch is formed of a substrate that has a central portion of SiC or other photoconductive material and an outer portion of cvd-diamond or other suitable material surrounding the central portion. Conducting electrodes are formed on opposed sides of the substrate, with the electrodes extending beyond the central portion and the edges of the electrodes lying over the outer portion. Thus any high electric fields produced at the edges of the electrodes lie outside of and do not affect the central portion, which is the active switching element. Light is transmitted through the outer portion to the central portion to actuate the switch.

Claims (26)

1. A method of making a photoconductive switch, comprising:

providing a substrate comprising:

a photoconductive central portion; and

a non-photoconductive outer portion surrounding the central portion; and

forming conducting electrodes on opposed sides of the substrate, with the electrodes covering the central portion and extending beyond the central portion, wherein each electrode comprises an edge, wherein each of the edges of the electrodes lie over the outer portion.

2. The method of claim 1 , further comprising forming the outer portion of a first material with a higher bulk breakdown strength than a second material in the central portion.

3. The method of claim 2 , wherein the first material is optically transparent to light used to actuate the switch.

4. The method of claim 3 , wherein the outer portion is formed of a material that is sufficiently thermally conductive to effectively remove heat from the central portion of the switch.

5. method of claim 4 , wherein the outer portion is formed of a material that forms a strong electric field tolerant bond to the central portion.

6. The method of claim 1 , wherein the central portion is formed of a wide band gap material.

7. The method of claim 6 , wherein the wide band gap material is a greater-than-2.5 eV wide band gap material.

8. The method of claim 1 , wherein the central portion is formed of a compensated, semi-insulating material.

9. The method of claim 8 , wherein the material is selected from SiC, GaN, AlN, and diamond.

10. The method of claim 9 , wherein the material is SiC doped with at least one of the following dopants: Boron, Vanadium, Nitrogen, Aluminum, Phosphorus, Oxygen, Tungsten and Zinc.

11. The method of claim 1 , wherein the outer portion is formed of cvd-diamond.

12. The method of claim 11 , wherein the central portion is formed of SiC.

13. The method of claim 1 , further comprising electrically connecting a voltage source to the electrodes.

14. method of claim 1 , further comprising operatively positioning a light receiving facet such that it is orthogonal to the opposed sides on which the electrodes are formed for receiving optical energy to actuate the switch.

15. The method of claim 14 , further comprising providing a laser or other light source configured to be optically coupled to the light receiving facet.

16. A method of making a photoconductive switch, comprising:

providing a substrate comprising:

a photoconductive central portion comprising a first material; and

an outer portion surrounding the central portion, wherein the substrate has a first electrode-contacting surface on a first side of the substrate and a second electrode-contacting surface on a second side of the substrate directly opposite of the first side, wherein the substrate further includes a light receiving facet orthogonal to the first electrode-contacting surface and the second electrode-contacting surface; and

electrically connecting a first conducting electrode to the first electrode-contacting surface and a second conducting electrode to the second electrode-contacting surface, wherein the first conducting electrode and the second conducting electrode are configured for applying a potential across the substrate, wherein the dimensions of the electrodes are greater than the dimensions of the central portion so that the electrodes cover the central portion and extend beyond the central portion and all of the edges of the electrodes lie over the outer portion, wherein the effects of high electric fields produced at the edges of the electrodes lie outside of and do not substantially affect the central portion, wherein the outer portion is formed of a second material that has a higher bulk breakdown strength than the first material in the central portion and that is optically transparent to light used to actuate the switch, and the central portion is formed of a wide band gap material.

17. The method of claim 16 , wherein the outer portion is made of cvd-diamond and the central portion is made of SiC or GaN.

18. The method of claim 16 , further comprising providing a voltage source electrically connected to the electrodes and a laser or other light source optically coupled to the facet.

Assignments (2)
CONFIRMATORY LICENSE Recorded Dec 16, 2013
From: LAWRENCE LIVERMORE NATIONAL SECURITY, LLC
To: U.S. DEPARTMENT OF ENERGY
Reel/Frame 031829/0083 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 8, 2013
From: CAPORASO, GEORGE J.
To: LAWRENCE LIVERMORE NATIONAL SECURITY, LLC
Reel/Frame 031361/0121 →
Continuity (3)
Continuation 12775156 · May 6, 2010
Provisional Application 61176375 · May 7, 2009
Related Publication 20140038321A1 · Feb 6, 2014