IP Library › Granted Patent US 9,277,869
Granted Patent B2
US 9,277,869 · App. 14/047,649 · Granted Mar 8, 2016

Thin-film piezoelectric element, thin-film piezoelectric actuator, thin-film piezoelectric sensor, hard disk drive, and inkjet printer apparatus

Inventors: Katsuyuki Kurachi (Tokyo, JP); Yasuhiro Aida (Tokyo, JP); Hitoshi Sakuma (Tokyo, JP); Kazuhiko Maejima (Tokyo, JP)
Assignee: TDK CORPORATION
A61B5/02444B41J2/14233G01C19/5621G01L9/008G11B5/483G11B5/5552H01L41/0815H01L41/1873H01L41/316B41J2202/03
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Quick Facts
Patent No.
US 9,277,869
App. No.
14/047,649
Granted
Mar 8, 2016
Kind
B2
Abstract

There are provided a thin-film piezoelectric element including a piezoelectric thin film which has an alkali niobate-based perovskite structure represented by the composition formula (K 1-w-x Na w Sr x ) m (Nb 1-y Zr y )O 3 and which is preferentially oriented to (001), and a pair of electrode films that sandwich the piezoelectric thin film, a thin-film piezoelectric actuator, and a thin-film piezoelectric sensor each including the thin-film piezoelectric element.

Claims (15)

1. A thin-film piezoelectric element comprising:

a piezoelectric thin film; and a pair of electrode films that sandwich the piezoelectric thin film,

wherein the piezoelectric thin film has an alkali niobate-based perovskite structure represented by the composition formula (K 1-w-x Na w Sr x ) m (Nb 1-y Zr y )O 3 and is preferentially oriented to (001),

wherein

0.95≦m<1.05, and 0.6≦(m·x/y)≦0.8.

2. The thin-film piezoelectric element according to claim 1 , wherein in the piezoelectric thin film, a Na (sodium)/(Na+K (potassium)) ratio is 0.5 or more and 0.75 or less.

3. The thin-film piezoelectric element according to claim 1 , further comprising a strontium ruthenate thin film provided between the piezoelectric thin film and at least one of the pair of electrode films.

4. The thin-film piezoelectric element according to claim 1 , wherein m=0.96 and (m·x/y)=0.67.

5. The thin-film piezoelectric element according to claim 1 , wherein m=1.00 and (m·x/y)=0.70.

6. The thin-film piezoelectric element according to claim 1 , wherein m=1.04 and (m·x/y)=0.73.

7. The thin-film piezoelectric element according to claim 1 , wherein m=1.04 and (m·x/y)=0.78.

8. A thin-film piezoelectric actuator comprising the thin-film piezoelectric element according to claim 1 .

9. A thin-film piezoelectric sensor comprising the thin-film piezoelectric element according to claim 1 .

10. A hard disk drive comprising the thin-film piezoelectric actuator according to claim 8 .

11. An ink jet printer apparatus comprising the thin-film piezoelectric actuator according to claim 8 .

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 7, 2013
From: KURACHI, KATSUYUKI; AIDA, YASUHIRO; SAKUMA, HITOSHI; MAEJIMA, KAZUHIKO
To: TDK CORPORATION
Reel/Frame 031463/0150 →
Continuity (2)
Continuation In Part 13687786 · Nov 28, 2012
Related Publication 20140145555A1 · May 29, 2014