Semiconductor device structures and methods of forming semiconductor structures
View Patent ↗A method of patterning a semiconductor film is described. According to an embodiment of the present invention, a hard mask material is formed on a silicon film having a global crystal orientation wherein the semiconductor film has a first crystal plane and second crystal plane, wherein the first crystal plane is denser than the second crystal plane and wherein the hard mask is formed on the second crystal plane. Next, the hard mask and semiconductor film are patterned into a hard mask covered semiconductor structure. The hard mask covered semiconductor structured is then exposed to a wet etch process which has sufficient chemical strength to etch the second crystal plane but insufficient chemical strength to etch the first crystal plane.
1. A nonplanar transistor, comprising:
a semiconductor body disposed on and continuous with a bulk monocrystalline silicon substrate, the semiconductor body comprising inwardly tapered sidewalls that each taper inward from the top of the semiconductor body at an angle of approximately 62.5 degrees, wherein charge migration in the semiconductor body is along a direction perpendicular to the sidewalls; and
a gate electrode disposed over the semiconductor body and orthogonal to the direction of charge migration.
2. The nonplanar transistor of claim 1 , wherein each sidewall is flat from the top of the semiconductor body to the bottom of the semiconductor body.
3. The nonplanar transistor of claim 1 , wherein the nonplanar transistor is a p type field effect transistor, and wherein the direction perpendicular to the sidewalls is parallel to a <110> plane of the bulk monocrystalline silicon substrate.
4. The nonplanar transistor of claim 1 , further comprising: a high-k gate dielectric layer disposed between the semiconductor body and the gate electrode.
5. The nonplanar transistor of claim 1 , wherein the gate electrode is a metal gate electrode.
6. A nonplanar transistor, comprising:
a semiconductor body disposed on and continuous with a bulk monocrystalline silicon substrate, the semiconductor body comprising inwardly tapered sidewalls, wherein charge migration in the semiconductor body is along a direction perpendicular to the sidewalls; and
a gate electrode disposed over the semiconductor body and orthogonal to the direction of charge migration, wherein the nonplanar transistor is a p type field effect transistor, and wherein the direction perpendicular to the sidewalls is parallel to a <110> plane of the bulk monocrystalline silicon substrate.
7. The nonplanar transistor of claim 6 , wherein each sidewall is flat from the top of the semiconductor body to the bottom of the semiconductor body.
8. The nonplanar transistor of claim 6 , further comprising: a high-k gate dielectric layer disposed between the semiconductor body and the gate electrode.
9. The nonplanar transistor of claim 6 , wherein the gate electrode is a metal gate electrode.