IP Library Granted Patent US 9,484,225
Granted Patent B2
US 9,484,225 · App. 14/053,233 · Granted Nov 1, 2016

Method for packaging circuits

Inventors: Chia Y. Poo (Singapore, SG); Low S. Waf (Singapore, SG); Boon S. Jeung (Singapore, SG); Eng M. Koon (Singapore, SG); Chua S. Kwang (Singapore, SG)
Assignee: Micron Technology, Inc.
H01L21/56H01L21/6835H01L22/00H01L24/05H01L25/0657H01L25/50H01L2221/68345H01L2225/06524H01L2225/06541H01L2225/06551H01L2225/06575H01L2924/12042H01L2924/14Y10T29/4913Y10T29/49128Y10T29/49144Y10T29/49146Y10T29/49155Y10T29/49165Y10T29/49167Y10T29/49169Y10T29/49794
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Quick Facts
Patent No.
US 9,484,225
App. No.
14/053,233
Granted
Nov 1, 2016
Kind
B2
Abstract

A method for packaging integrated circuit chips (die) is described that includes providing a base substrate with package level contacts, coating a base substrate with adhesive, placing dies on the adhesive, electrically connecting the die to the package level contacts, and removing the backside of the base substrate to expose the backside of the package level contacts. Accordingly, an essentially true chip scale package is formed. Multi-chip modules are formed by filling gaps between the chips with an encapsulant. In an embodiment, chips are interconnected by electrical connections between package level contacts in the base substrate. In an embodiment, substrates each having chips are adhered back-to-back with through vias formed in aligned saw streets to interconnect the back-to-back chip assembly.

Claims (23)

1. A chip-scale-packaging method, comprising:

singulating a die from a first wafer;

testing the singulated die;

forming final I/O locations on a second wafer;

applying adhesive to a top surface of the second wafer;

placing the singulated die on the adhesive over the final I/O locations;

removing a back surface of the second wafer to expose the final I/O locations; and

connecting the singulated die to an electric circuit through the final I/O location,

wherein singulating the die from the first wafer includes mechanically cutting saw streets to form a side of the first and second wafers, and wherein singulating the die includes exposing at least one electrical connection along the side of the first and second wafers.

2. The chip-scale-packaging method of claim 1 , wherein removing the back surface of the second wafer includes backgrinding the second wafer.

3. The chip-scale-packaging method of claim 1 , wherein removing the back surface of the second wafer includes etching the back surface of the second wafer.

4. The chip-scale-packaging method of claim 1 , wherein removing the back surface of the second wafer includes separating the singulated die and a portion of the second wafer from a remainder of the second wafer.

5. The method of claim 1 , wherein removing the back surface of the second wafer includes backgrinding the second wafer.

6. The method of claim 1 , wherein removing the back surface of the second wafer includes etching the back surface of the second wafer.

7. A chip-scale-packaging method, comprising:

singulating a die from a first wafer;

testing the singulated die;

forming final I/O locations on a second wafer;

applying adhesive to a top surface of the second wafer;

placing the singulated die on the adhesive over the final I/O locations;

removing a back surface of the second wafer to expose the final I/O locations; and

connecting the singulated die to an electric circuit through the final I/O location,

wherein singulating the die includes exposing at least one electrical connection along a side of the first and second wafers.

Assignments (8)
RELEASE OF SECURITY INTEREST Recorded Nov 12, 2019
From: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.; MICRON SEMICONDUCTOR PRODUCTS, INC.
Reel/Frame 051028/0001 →
RELEASE OF SECURITY INTEREST Recorded Oct 9, 2019
From: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.
Reel/Frame 050937/0001 →
RELEASE OF SECURITY INTEREST Recorded Aug 23, 2018
From: U.S. BANK NATIONAL ASSOCIATION, AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.
Reel/Frame 047243/0001 →
SECURITY INTEREST Recorded Jul 13, 2018
From: MICRON TECHNOLOGY, INC.; MICRON SEMICONDUCTOR PRODUCTS, INC.
To: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
Reel/Frame 047540/0001 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REPLACE ERRONEOUSLY FILED PATENT #7358718 WITH THE CORRECT PATENT #7358178 PREVIOUSLY RECORDED ON REEL 038669 FRAME 0001. ASSIGNOR(S) HEREBY CONFIRMS THE SECURITY INTEREST. Recorded Jun 8, 2017
From: MICRON TECHNOLOGY, INC.
To: U.S. BANK NATIONAL ASSOCIATION, AS COLLATERAL AGENT
Reel/Frame 043079/0001 →
PATENT SECURITY AGREEMENT Recorded Jun 2, 2016
From: MICRON TECHNOLOGY, INC.
To: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
Reel/Frame 038954/0001 →
SECURITY INTEREST Recorded May 12, 2016
From: MICRON TECHNOLOGY, INC.
To: U.S. BANK NATIONAL ASSOCIATION, AS COLLATERAL AGENT
Reel/Frame 038669/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 13, 2014
From: POO, CHIA Y.; WAF, LOW S.; JEUNG, BOON S.; KOON, ENG M.; KWANG, CHUA S.
To: MICRON TECHNOLOGY, INC.
Reel/Frame 033526/0965 →
Priority Claims (1)
SG 200302511-1 · May 6, 2003 · national
Continuity (4)
Division 13299120 · Nov 17, 2011
Division 12705923 · Feb 15, 2010
Division 10744632 · Dec 23, 2003
Related Publication 20140045280A1 · Feb 13, 2014