IP Library Granted Patent US 9,360,689
Granted Patent B2
US 9,360,689 · App. 14/054,342 · Granted Jun 7, 2016

Optical modulator including grapene

Inventors: Ming Liu (Riverside, CA); Xiaobo Yin (Boulder, CO); Xiang Zhang (Alamo, CA)
Assignee: The Regents of the University of California
G02F1/025B82Y20/00G02F2001/0156G02F2202/02
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Quick Facts
Patent No.
US 9,360,689
App. No.
14/054,342
Granted
Jun 7, 2016
Kind
B2
Abstract

The present invention provides for a one or more layer graphene optical modulator. In a first exemplary embodiment the optical modulator includes an optical waveguide, a nanoscale oxide spacer adjacent to a working region of the waveguide, and a monolayer graphene sheet adjacent to the spacer. In a second exemplary embodiment, the optical modulator includes at least one pair of active media, where the pair includes an oxide spacer, a first monolayer graphene sheet adjacent to a first side of the spacer, and a second monolayer graphene sheet adjacent to a second side of the spacer, and at least one optical waveguide adjacent to the pair.

Claims (30)

1. An optical modulator comprising:

an optical waveguide;

an oxide layer disposed on the optical waveguide;

a graphene sheet disposed on the oxide layer, the graphene sheet being selected from a group consisting of a single layer of carbon atoms and multiple layers of carbon atoms; and

an electrode in contact with the graphene sheet.

2. The optical modulator of claim 1 , wherein the optical waveguide comprises a dielectric material.

3. The optical modulator of claim 1 , wherein the optical waveguide comprises a material selected from a group consisting of silicon, silicon nitride, and silicon dioxide.

4. The optical modulator of claim 1 , wherein the optical waveguide comprises a plasmonic waveguide having a metallic structure configured to support propagating surface plasmon waves.

5. The optical modulator of claim 1 , wherein the optical waveguide has a quality factor within a range selected from a group consisting of 10 to 100, 10 to 1000, 10 to 10000, 10 to 100000, and 10 to 1000000.

6. The optical modulator of claim 1 , wherein the oxide layer comprises a material selected from a group consisting of aluminum oxide, hafnium oxide, and silicon dioxide.

7. The optical modulator of claim 1 , wherein the optical waveguide comprises a low Q optical cavity.

8. The optical modulator of claim 1 , wherein the optical waveguide comprises a material that is doped.

9. The optical modulator of claim 1 , wherein the optical waveguide comprises a transparent material.

10. The optical modulator of claim 9 , wherein the transparent material comprises a transparent polymer.

11. The optical modulator of claim 9 , wherein the transparent material comprises SU-8 photoresist.

12. The optical modulator of claim 1 , wherein the optical waveguide comprises a nanoscale structure.

13. An optical modulator comprising:

an optical waveguide;

a first graphene sheet disposed on the optical waveguide;

a first electrode in contact with the first graphene sheet;

an oxide layer disposed on the first graphene sheet;

a second graphene sheet disposed on the oxide layer; and

a second electrode in contact with the second graphene sheet.

14. The optical modulator of claim 13 , wherein the optical waveguide comprises a material selected from a group consisting of silicon, silicon nitride, and silicon dioxide.

15. The optical modulator of claim 13 , wherein the oxide layer comprises a material selected from a group consisting of aluminum oxide, hafnium oxide, and silicon dioxide.

16. The optical modulator of claim 13 , wherein the optical waveguide comprises a transparent material.

17. The optical modulator of claim 16 , wherein the transparent material comprises SU-8 photoresist.

18. The optical modulator of claim 13 , wherein the optical waveguide comprises a material that is doped.

19. The optical modulator of claim 13 , wherein the first graphene sheet and the second graphene sheet each comprise a a single layer of carbon atoms.

20. The optical modulator of claim 13 , wherein the first graphene sheet and the second graphene sheet each comprise multiple layers of carbon atoms.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 20, 2014
From: LIU, MING; YIN, XIAOBO; ZHANG, XIANG
To: THE REGENTS OF THE UNIVERSITY OF CALIFORNIA
Reel/Frame 032962/0778 →
CONFIRMATORY LICENSE Recorded Apr 24, 2014
From: REGENTS OF THE UNIVERSITY OF CALIFORNIA, THE
To: ENERGY, UNITED STATES DEPARTMENT OF
Reel/Frame 032799/0623 →
Continuity (4)
Continuation In Part PCTUS2012034418 · Apr 20, 2012
Provisional Application 61478467 · Apr 22, 2011
Provisional Application 61598471 · Feb 14, 2012
Related Publication 20140056551A1 · Feb 27, 2014