High ion and low sub-threshold swing tunneling transistor
View Patent ↗Devices and manufacturing methods thereof are presented. The device includes a substrate and a fin-type transistor disposed on the substrate. The transistor includes a fin structure that protrudes from the substrate to serve as a source of the transistor. The fin structure is doped with dopants of a first polarity. The transistor also includes a gate layer formed over and around a first end of the fin structure to serve as a gate of the transistor. A drain layer is disposed over the fin structure and adjacent to the gate layer to serve as a drain of the transistor. The drain layer is doped with dopants of a second polarity opposite the first polarity.
1. A device comprising:
a substrate; and
a fin-type transistor disposed on the substrate, wherein the transistor comprises
a fin structure protruding from the substrate to serve as a source of the transistor, the fin structure doped with dopants of a first polarity,
a gate layer disposed over and around a first end of the fin structure to serve as a gate of the transistor, and
a drain layer disposed over the fin structure and adjacent to the gate layer to serve as a drain of the transistor, the drain layer doped with dopants of a second polarity opposite the first polarity.
2. The device of claim 1 , wherein four surfaces of the fin structure which are at least partially adjacent to the gate layer serve as tunneling surfaces.
3. The device of claim 1 , wherein the transistor further comprises:
a fin buffer layer disposed on and around the first end of the fin structure.
4. The device of claim 3 , wherein the fin buffer layer comprises a band gap engineered layer.
5. The device of claim 3 , wherein the transistor further comprises:
a gate dielectric layer disposed over the fin buffer layer; and
a work function tuning layer disposed between the gate dielectric layer and the gate layer.
6. The device of claim 1 , wherein the transistor further comprises:
an intrinsically-doped layer disposed between the fin structure and the drain layer to serve as an intrinsic region of the transistor; and
a dielectric spacer disposed between the drain layer and the gate layer.
7. A method of manufacturing a device, comprising:
forming a fin-type transistor on a substrate, wherein forming the transistor comprises:
forming a fin structure that protrudes from the substrate to serve as a source of the transistor, the fin structure doped with dopants of a first polarity;
forming a gate layer over and around a first end of the fin structure to serve as a gate of the transistor; and
forming a drain layer over the fin structure and adjacent to the gate layer to serve as a drain of the transistor, the drain layer doped with dopants of a second polarity opposite the first polarity.
8. The method of claim 7 , wherein forming the gate layer over and around the first end of the fin structure comprises forming the gate layer adjacent to four surfaces of the fin structure which serve as tunneling surfaces.
9. The method of claim 7 , wherein forming the drain layer over the fin structure comprises forming the drain layer over the fin structure and around a second end of the fin structure opposite the first end of the fin structure.
10. The method of claim 7 , wherein forming the fin structure further comprises:
forming an inter-level dielectric layer on the substrate and around the fin structure.
11. The method of claim 10 , further comprising:
prior to forming the gate layer, forming a fin buffer layer on and around the first end of the fin structure.
12. The method of claim 11 , wherein the fin buffer layer is a band gap engineered layer with pockets of intrinsic dopants and dopants of the second polarity.
13. The method of claim 11 , further comprising:
forming a first gate dielectric layer on the fin buffer layer and the inter-level dielectric layer with a part of the fin buffer layer exposed.
14. The method of claim 13 , further comprising:
forming a dummy gate layer on the first gate dielectric layer; and
forming a dielectric spacer on the fin buffer layer adjacent to the dummy gate layer and the first gate dielectric layer.
15. The method of claim 14 , wherein forming the drain layer comprises:
forming an intrinsically-doped layer on and around a second end of the fin structure opposite the first end of the fin structure to serve as an intrinsic region of the transistor; and
forming the drain layer on the intrinsically-doped layer.
16. The method of claim 15 , further comprising:
prior to forming the intrinsically-doped layer and the drain layer, removing a second end of the fin structure opposite the first end of the fin structure to form a recess on the substrate.
17. The method of claim 15 , further comprising:
performing a silicidation process;
forming an inter-level dielectric layer (ILD) over the substrate; and
performing a chemical-mechanical polishing process.
18. The method of claim 15 , wherein forming the gate layer comprises:
removing the dummy gate layer;
removing the first gate dielectric layer;
forming a second gate dielectric layer adjacent to the dielectric spacer and on the fin buffer layer and the inter-level dielectric layer; and
forming the gate layer on the second gate dielectric layer.
19. The method of claim 18 , wherein forming the gate layer further comprises:
removing the fin buffer layer which is an intrinsically-doped layer; and
prior to forming the second gate dielectric layer, forming a band gap engineered layer doped with dopants of the first polarity and having pockets of intrinsic dopants and dopants of the second polarity.
20. The method of claim 18 , wherein forming the transistor further comprises:
performing a silicidation process for the source or drain region.