Chemical mechanical polishing conditioner and manufacturing methods thereof
The present invention relates to a method for manufacturing a chemical mechanical polishing conditioner, comprising: (A) providing a non-planar substrate; (B) providing a binding layer disposed on the surface of the non-planar substrate; (C) providing a plurality of abrasive particles embedded in a surface of the binding layer, and (D) heat curing the binding layer, such that the non-planar substrate is deformed into a planar substrate during curing the binding layer, and the abrasive particles are fixed to a surface of the planar substrate by the binding layer; wherein, after step (D), tips of the abrasive particles have a leveled height. Therefore, the present can effectively improve the problem of thermal deformation of the substrate of the chemical mechanical polishing conditioner during a heat curing process, and enhance surface flatness of the chemical mechanical polishing conditioner.
1. A method for manufacturing a chemical mechanical polishing conditioner, comprising:
(A) providing a non-planar substrate;
(B) providing a binding layer disposed on the surface of the non-planar substrate;
(C) providing a plurality of abrasive particles embedded in a surface of the binding layer, and
(D) heat curing the binding layer, such that the non-planar substrate is deformed into a planar substrate during curing the binding layer, and the abrasive particles are fixed to a surface of the planar substrate by the binding layer;
wherein, after step (D), tips of the abrasive particles have a leveled height;
wherein a surface of the non-planar substrate has a center surface and an outer edge surface, and a working surface is formed between the center surface and the outer edge surface; and
wherein the working surface has a non-planar contour.
2. The method for manufacturing a chemical mechanical polishing conditioner of claim 1 , wherein the non-planar contour is spherical.
3. The method for manufacturing a chemical mechanical polishing conditioner of claim 1 , wherein a height difference between the center surface and the outer edge surface is 5-5000 μm.
4. The method for manufacturing a chemical mechanical polishing conditioner of claim 1 , wherein the heat curing of the binding layer is performed by brazing, heat-curing, ultraviolet radiation curing, electroplating, or sintering.
5. The method for manufacturing a chemical mechanical polishing conditioner of claim 1 , wherein the abrasive particles are diamond or cubic boron nitride.
6. The method for manufacturing a chemical mechanical polishing conditioner of claim 1 , wherein the abrasive particles have a particle size of 20-450 μm.
7. The method for manufacturing a chemical mechanical polishing conditioner of claim 1 , wherein, in the step (C), the abrasive particles are embedded in the surface of the binding layer by a template.
8. The method for manufacturing a chemical mechanical polishing conditioner of claim 1 , wherein, in the step (C), the abrasive particles are embedded in the surface of the binding layer by a platen.
9. The method for manufacturing a chemical mechanical polishing conditioner of claim 1 , wherein, in the step (C), the abrasive particles are embedded in the surface of the binding layer by a temporary mold.
10. The method for manufacturing a chemical mechanical polishing conditioner of claim 1 , wherein the non-planar contour is non-spherical.