Integrated chromatography devices and systems for monitoring analytes in real time and methods for manufacturing the same
Systems and methods for monitoring analytes in real time using integrated chromatography systems and devices. Integrated microfluidic liquid chromatography devices and systems include multiple separation columns integrated into a single substrate. Using such a device, parallel analysis of multiple samples can be performed simultaneously and/or sequential analysis of a single sample can be performed simultaneously on a single chip or substrate. The devices and systems are well suited for use in high pressure liquid chromatography (HPLC) applications. HPLC chips and devices including embedded parylene channels can be fabricated using a single mask process.
1. A method of forming embedded filter and column sections in a chromatography device; comprising:
providing a substrate;
forming an oxide layer on a first side of said substrate;
etching the oxide layer using a single mask to expose the substrate and define device features including a filter section adjacent a separation column section, wherein a width of a channel defining the filter section is narrower that a width of a channel defining the column section;
etching the defined device features;
depositing a layer of parylene in the filter section channel and column section channel for a period of time sufficient to seal the narrower filter section channel, and
after the filter section channel has been sealed, continuing to deposit parylene, wherein parylene diffuses into the enclosed filter section channel from the adjacent column section channel thereby reducing a cross-sectional dimension of the filter section.
2. The method of claim 1 , wherein the steps of depositing and continuing to deposit parylene include a single chemical vapor deposition (CVD) process.
3. The method of claim 1 , wherein the parylene is parylene-C.
4. The method of claim 1 , wherein etching the defined device features includes etching with xenon difluoride (XeF 2 ).
5. The method of claim 1 , wherein etching the oxide layer includes applying a hydrogen fluoride (HF) etch to expose the substrate and define the device features.
6. The method of claim 1 , wherein a layer of parylene including the device features is formed on the substrate, the method further comprising:
removing the parylene layer from the substrate so as to provide a thin-film parylene device comprising the device features.
7. The method of claim 1 , further comprising:
using one or more additional masks to define additional device features.
8. A method of forming an integrated chromatography device; comprising:
providing a substrate having neighboring etched regions in a surface of the substrate, one etched region being narrower and one etched region being wider;
depositing a polymer over the neighboring etched regions sufficient to coat a portion of a bottom of and seal over the narrower etched region and define an inner channel, the depositing continuing to coat an inner surface of the inner channel from the polymer diffusing through the wider region until the wider etched region is sealed over by the deposition,
whereby the sealed over narrower region defines a filter and the sealed over wider region defines a separation column.
9. The method of claim 8 , further comprising:
peeling the polymer with the sealed over regions from the substrate.
10. The method of claim 8 , wherein the depositing uses chemical vapor deposition (CVD).
11. The method of claim 8 , wherein polymer is parylene.
12. The method of claim 8 , wherein the substrate comprises silicon, glass, plastic, or metal.
13. The method of claim 8 , further comprising:
integrating a sample detector into the substrate to be in fluid communication with an outlet of the separation column.
14. The method of claim 8 , wherein the separation column comprises a cation exchange chromatographic separation column or an anion exchange chromatographic separation column.
15. The method of claim 8 , wherein the separation column comprises a reverse-phase liquid chromatographic separation column or an ion-exchange chromatographic separation column.
16. The method of claim 8 , wherein separation column is characterized by a column diameter of no more than about 200 microns.
17. The method of claim 8 , wherein separation column is characterized by a column diameter of no more than about 100 microns.
18. A method of forming a multi-column integrated chromatography device; comprising:
providing a substrate having multiple etched regions in a surface of the substrate, some of the etched regions being narrower than adjacent wider regions;
depositing a polymer over the multiple etched regions sufficient to coat a portion of a bottom of and seal over the narrower etched regions and define inner channels in said narrower etched regions;
continuing to deposit the polymer over the multiple etched regions sufficient to coat inner surfaces of the inner channels by diffusing the polymer through the wider regions into the inner surfaces of the inner channels until the wider etched regions are sealed over by the deposition,
whereby the sealed over narrower regions defines filters and the sealed over wider regions define separation columns.
19. The method of claim 18 , further comprising:
peeling the polymer with the sealed over regions from the substrate.
20. The method of claim 18 , further comprising:
pumping a first sample from a first reservoir into one of the filters and separation columns; and
pumping a second sample from a second reservoir into another of the filters and separation columns.