Forming array contacts in semiconductor memories
View Patent ↗Array contacts for semiconductor memories may be formed using a first set of parallel stripe masks and subsequently a second set of parallel stripe masks transverse to the first set. For example, one set of masks may be utilized to etch a dielectric layer, to form parallel spaced trenches. Then the trenches may be filled with a sacrificial material. That sacrificial material may then be masked transversely to its length and etched, for example. The resulting openings may be filled with a metal to form array contacts.
1. A semiconductor device comprising:
a semiconductor memory array;
a dielectric material over said memory array;
a plurality of parallel spaced filled trenches in said dielectric material;
a plurality of spaced openings along the length of each said trenches; and
array contacts formed in said plurality of openings.
2. The semiconductor device of claim 1 including spaced, parallel address lines, where said array contacts are formed between the address lines.
3. The semiconductor device of claim 1 including address lines in said dielectric material in contact with said array contacts extending from said address lines.
4. The semiconductor device of claim 1 wherein said array contacts have tapered side walls.
5. The semiconductor device of claim 1 wherein said array contacts are columnar with a rectangular cross-section.
6. The semiconductor device of claim 1 wherein said array contacts are columnar with a circular cross-section.
7. The semiconductor device of claim 1 wherein said array contacts include a conductive material formed in said plurality of openings.
8. The semiconductor device of claim 7 , further comprising a metal layer over the dielectric material and in electrical contact with said array contacts.
9. The semiconductor device of claim 8 wherein the metal layer is the same material as the array contacts.
10. The semiconductor device of claim 1 wherein the plurality of spaced openings extend through the dielectric material to the semiconductor memory array and wherein the array contacts are in electrical contact with the semiconductor memory array.
11. The device of claim 1 wherein the array contacts are sized below a lithographic limit.
12. The device of claim 1 wherein the memory array comprises flash memory.
13. The device of claim 1 wherein the filled trenches are filled with polysilicon.
14. A semiconductor device comprising:
a plurality of parallel spaced conductive lines;
a plurality of parallel spaced active areas below and extending generally perpendicularly to said conductive lines;
a dielectric filling regions around said conductive lines;
a plurality of parallel spaced filled trenches in said dielectric material;
a plurality of spaced openings along the length of each of said trenches; and
array contacts formed in said plurality of openings.
15. The device of claim 14 wherein the conductive lines are control gates.
16. The device of claim 14 wherein the trenches are situated between and parallel to said conductive lines.
17. The device of claim 14 wherein the trenches are situated above and in substantially the same direction as said active areas.
18. The device of claim 14 including spaced, parallel address lines, where said array contacts are formed between the address lines.
19. The device of claim 14 including address lines in said dielectric in contact with said array contacts extending from said address lines.
20. The device of claim 14 wherein said array contacts have tapered side walls.