Resonator and fabricating method thereof
Provided are a resonator and a method of fabricating the same. The resonator may include a first electrode disposed on a substrate, a piezoelectric layer disposed on the first electrode, a second electrode disposed on the piezoelectric layer, and a control layer disposed on the second electrode and having a frame with an uneven surface.
1. A resonator comprising:
a first electrode disposed on a substrate;
a piezoelectric layer disposed on the first electrode;
a second electrode disposed on the piezoelectric layer; and
a control layer disposed on the second electrode and comprising a frame with an uneven surface.
2. The resonator of claim 1 , wherein the piezoelectric layer is configured to convert an electrical energy input from the first electrode into an acoustic wave; and
the frame with the uneven surface is configured to control the acoustic wave.
3. The resonator of claim 1 , wherein the frame has a shape of a closed curved surface in a plan view, and the uneven surface is disposed on an inner side surface of the frame.
4. The resonator of claim 1 , wherein the uneven surface of the frame comprises a circular concave portion or a polygonal concave portion.
5. The resonator of claim 1 , wherein the control layer is disposed on the second electrode with a shape of a closed curved surface in a plan view, and the control layer comprises the uneven surface on an inner side surface and another uneven surface on an outer side surface of the frame.
6. The resonator of claim 1 , wherein the uneven surface of the frame comprises at least one circular concave portion and at least one polygonal concave portion.
7. The resonator of claim 1 , wherein the control layer further comprises a second frame arranged horizontally from the frame.
8. The resonator of claim 1 , wherein the control layer further comprises a second frame arranged vertically from the frame.
9. The resonator of claim 1 , wherein the control layer has a shape of a discontinuous curved surface having at least one opening, and the uneven surface is disposed on an inner side surface of the frame.
10. The resonator of claim 1 , wherein the control layer is disposed on the second electrode with an edge of the closed curved surface disposed along a periphery of the second electrode in a plan view, and a thickness, a height, or a width of a first area of the frame differs from a thickness, a height, or a width of a second area of the frame disposed opposite to the first area.
11. The resonator of claim 1 , further comprising:
a reflective layer configured to reflect an acoustic wave based on a signal applied to the first electrode and the second electrode.
12. The resonator of claim 11 , wherein the reflective layer comprises:
a first reflective layer disposed below the first electrode; and
a second reflective layer disposed below the first reflective layer, the second reflective layer having a higher acoustic impedance than the first reflective layer.
13. A resonator comprising:
a first electrode disposed on a substrate, a portion of the first electrode spaced apart from the substrate;
a piezoelectric layer disposed on the first electrode;
a second electrode disposed on the piezoelectric layer; and
a control layer disposed between the first electrode and the substrate and comprising an uneven surface.
14. The resonator of claim 13 , wherein the piezoelectric layer is configured to convert energy input from the first electrode into an acoustic wave; and
the control layer is configured to control the acoustic wave.
15. The resonator of claim 13 , wherein the control layer has a shape of a closed curved surface in a plan view, and the uneven surface is disposed on an inner side surface of the control layer.
16. The resonator of claim 13 , wherein the uneven surface of the control layer comprises a circular concave portion or a polygonal concave portion, and the uneven surface is disposed on an outer side surface of the control layer.
17. The resonator of claim 13 , wherein the control layer has a shape of a closed curved surface in a plan view; the uneven surface is disposed on an inner side surface; and a second uneven surface is disposed on an outer side surface of the control layer.
18. A resonator comprising:
a reflective layer disposed on a substrate;
a first electrode disposed on the reflective layer;
a piezoelectric layer disposed on the first electrode;
a second electrode disposed on the piezoelectric layer; and
a control layer disposed on the second electrode and comprising an uneven surface,
wherein the piezoelectric first electrode is configured to convert energy input from the first electrode into an acoustic wave, and the control layer is configured to control the acoustic wave.
19. The resonator of claim 18 , wherein the reflective layer is configured to reflect the acoustic wave converted by the piezoelectric layer based on a signal applied to the first electrode and the second electrode; and
the first electrode is configured to input the energy to the piezoelectric layer based on the signal applied to the first electrode and the second electrode.
20. The resonator of claim 18 , wherein the control layer has a shape of a closed curved surface in a plan view, and comprises the uneven surface on an inner side surface.
21. The resonator of claim 18 , wherein the uneven surface of the control layer comprises a circular concave portion or a polygonal concave portion, and the control layer comprises another uneven surface on an outer side surface.
22. The resonator of claim 18 , wherein the control layer has a shape of a closed curved surface in a plan view; and the uneven surface is disposed an inner side surface; and another uneven surface is disposed on an outer side surface of the control layer.
23. A method of fabricating a resonator, the method comprising:
forming a piezoelectric layer on a first electrode;
forming a second electrode on the piezoelectric layer; and
forming a control layer on the second electrode,
wherein the control layer comprises a frame with an uneven surface.
24. The method of claim 23 , further comprising:
forming the first electrode on a substrate before the forming of the piezoelectric layer on the first electrode.
25. The method of claim 24 , further comprising:
forming a reflective layer on a substrate and forming the first electrode on the reflective layer before the forming of the piezoelectric layer on the first electrode,
wherein the piezoelectric layer is configured to convert an electrical energy input from the first electrode into an acoustic wave, and the control layer is configured to control the acoustic wave.