IP Library Granted Patent US 10,868,212
Granted Patent B2
US 10,868,212 · App. 14/077,548 · Granted Dec 15, 2020

Epitaxial formation structures and associated methods of manufacturing solid state lighting devices

Inventor: Thomas Pinnington (Somerville, MA)
Assignee: Micron Technology, Inc.
H01L33/04H01L21/76254H01L33/007H01L33/0093H01L33/12
View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 10,868,212
App. No.
14/077,548
Granted
Dec 15, 2020
Kind
B2
Abstract

Epitaxial formation structures and associated methods of manufacturing solid state lighting (“SSL”) devices with target thermal expansion characteristics are disclosed herein. In one embodiment, an SSL device includes a composite structure having a composite CTE temperature dependency, a formation structure on the composite structure, and an SSL structure on the formation structure. The SSL structure has an SSL temperature dependency, and a difference between the composite CTE and SSL temperature dependencies is below 3 ppm/° C. over the temperature range.

Claims (13)

1. An integrated semiconductor device assembly for use in forming a solid state lighting (SSL) device, the assembly comprising:

a substrate comprising a composite ceramic material, the composite ceramic material having a composite coefficient of thermal expansion (CTE) temperature dependency over a temperature range from 800° C. to 1100° C.;

a formation structure on the substrate, the formation structure comprising at least one of Si(1,1,1) silicon, gallium nitride (GaN), silicon carbide (SiC), sapphire (Al 2 O 3 ), zinc oxide (ZnO 2 ), or gallium arsenide (GaAs); and

an SSL structure on the formation structure, the SSL structure having an SSL CTE temperature dependency over the temperature range, the SSL structure comprising

a first semiconductor material including P-type gallium nitride,

a second semiconductor material including N-type gallium nitride, and

an active region, between the first and second semiconductor materials, comprising indium gallium nitride,

wherein a difference between the composite CTE and SSL CTE temperature dependencies is below a target threshold of 0.3 ppm/° C. over the temperature range, and

wherein the composite ceramic material comprises polycrystalline aluminum nitride (AlN), yttrium oxide (Y 2 O 3 ) and hafnium carbide (HfC) sintered together.

2. The assembly of claim 1 wherein the target threshold is below 0.1 ppm/° C.

3. The assembly of claim 1 wherein:

the polycrystalline aluminum nitride comprises 0.4 to 0.7 by volume of the composite ceramic material, and

the yttrium oxide comprises 0.01 to 0.2 by volume of the composite ceramic material.

Assignments (7)
RELEASE OF SECURITY INTEREST Recorded Nov 12, 2019
From: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.; MICRON SEMICONDUCTOR PRODUCTS, INC.
Reel/Frame 051028/0001 →
RELEASE OF SECURITY INTEREST Recorded Oct 9, 2019
From: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.
Reel/Frame 050937/0001 →
RELEASE OF SECURITY INTEREST Recorded Aug 23, 2018
From: U.S. BANK NATIONAL ASSOCIATION, AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.
Reel/Frame 047243/0001 →
SECURITY INTEREST Recorded Jul 13, 2018
From: MICRON TECHNOLOGY, INC.; MICRON SEMICONDUCTOR PRODUCTS, INC.
To: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
Reel/Frame 047540/0001 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REPLACE ERRONEOUSLY FILED PATENT #7358718 WITH THE CORRECT PATENT #7358178 PREVIOUSLY RECORDED ON REEL 038669 FRAME 0001. ASSIGNOR(S) HEREBY CONFIRMS THE SECURITY INTEREST. Recorded Jun 8, 2017
From: MICRON TECHNOLOGY, INC.
To: U.S. BANK NATIONAL ASSOCIATION, AS COLLATERAL AGENT
Reel/Frame 043079/0001 →
PATENT SECURITY AGREEMENT Recorded Jun 2, 2016
From: MICRON TECHNOLOGY, INC.
To: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
Reel/Frame 038954/0001 →
SECURITY INTEREST Recorded May 12, 2016
From: MICRON TECHNOLOGY, INC.
To: U.S. BANK NATIONAL ASSOCIATION, AS COLLATERAL AGENT
Reel/Frame 038669/0001 →