Adiabatic planar waveguide coupler transformer
Methods of depositing materials to provide for efficient coupling of light from a first device to a second device are disclosed. In general, these methods include mounting one or more wafers on a rotating table that is continuously rotated under one or more source targets. A process gas can be provided and one or more of the source targets powered while the wafers are biased to deposit optical dielectric films on the one or more wafers. In some embodiments, a shadow mask can be laterally translated across the one or more wafers during deposition. In some embodiments, deposited films can have lateral and/or horizontal variation in index of refraction and/or lateral variation in thickness.
1. A method of depositing materials, comprising:
mounting one or more wafers on a rotating table;
continuously rotating the rotating table under one or more source targets;
providing a process gas;
powering the one or more source targets;
biasing the one or more wafers with an RF bias; and
forming a tapered optical film by laterally translating a shadow mask across the one or more wafers during deposition.
2. The method of claim 1 wherein the tapered optical film is a uniform alloy of two or more source targets.
3. The method of claim 1 , wherein a composition of the tapered optical film is varied through a thickness of the tapered optical film.
4. The method of claim 1 , wherein the tapered optical film is uniform across the one or more wafers.
5. The method of claim 1 , wherein the tapered optical film changes composition as the shadow mask is laterally translated.
6. The method of claim 5 , wherein the tapered optical film has lateral variation in an index of refraction.
7. The method of claim 6 , wherein the tapered optical film has a variation of an index of refraction through its thickness.
8. The method of claim 1 , wherein forming the tapered optical film further comprises vertically translating the shadow mask across the one or more wafers during deposition.
9. The method of claim 1 , wherein the tapered optical film has lateral and vertical variation in an index of refraction.
10. A method of depositing materials in a first coating layer, comprising:
(a) cleaning a surface of one or more wafers using a cleaning chamber;
(b) mounting the one or more wafers on a rotating table;
(c) providing a process gas;
(d) rotating the rotating table under one or more source targets at a rotation speed;
(e) powering the one or more source targets;
(f) applying a bias to the one or more wafers;
(g) forming a tapered optical film by translating a shadow mask in a first direction across the one or more wafers during deposition; and
(h) determining whether an additional material layer is to be deposited.
11. The method of claim 10 , wherein the rotation speed is varied stepwise.
12. The method of claim 10 , wherein the first direction is laterally across the one or more wafers.
13. The method of claim 12 , wherein forming the tapered optical film by translating the shadow mask across the one or more wafers during deposition comprises translating the shadow mask across the one or more wafers in a second direction different from the first direction.
14. The method of claim 10 , wherein forming the tapered optical film comprises forming at least one converter layer deposited between one or more cladding layers and forming a core that uniformly varies laterally in one or more material properties, the one or more material properties including layer thickness and index of refraction.
15. The method of claim 10 , further comprising repeating steps (c)-(h) to form a second coating layer, the second coating layer having an average index of refraction less than an average index of refraction of the first coating layer.
16. A means for depositing a tapered optical film, comprising:
a means for securing one or more wafers to a rotating means;
a means for providing a process gas to the one or more wafers;
a means for powering one or more source targets;
a means for biasing the one or more wafers; and
a means for forming the tapered optical film with a continuously varying composition across the one or more wafers, the means for forming the tapered optical film being coupled to the rotating means and configured to be translated laterally during formation of the tapered optical film.
17. The means for depositing the tapered optical film of claim 16 , further comprising a means for linearly guiding the means for forming the tapered optical film.
18. The means for depositing the tapered optical film of claim 16 , further comprising a means to densify and mix deposition materials from the one or more source targets.
19. The means for depositing the tapered optical film of claim 16 , wherein the means for forming the tapered optical film is further configured to be translated vertically.
20. The means for depositing the tapered optical film of claim 16 , wherein the means for biasing the one or more wafers includes a separate means for biasing each wafer.