Nano-sensor array
View Patent ↗In one embodiment, a method is provided for the manufacture of a nano-sensor array. A base having a sensing region is provided along with a plurality of nano-sensors. Each of the plurality of nano-sensors is formed by: forming a first nanoneedle along a surface of the base, forming a dielectric on the first nanoneedle, and forming a second nanoneedle on the dielectric layer. The first nanoneedle of each sensor has a first end adjacent to the sensing region of the base. The second nanoneedle is separated from the first nanoneedle by the dielectric and has a first end adjacent the first end of the first nanoneedle. The base is provided with a fluidic channel. The plurality of nano-sensors and the fluidic channel are configured and arranged with the first ends proximate the fluidic channel to facilitate sensing of targeted matter in the fluidic channel.
1. A nano-sensor apparatus, comprising:
a base;
a channel proximate to the base and configured to pass target particles via fluidic pressure;
a plurality of nano-sensors wherein each nano-sensor of the plurality of nano-sensors includes:
a first nanoneedle and a second nanoneedle, wherein the first and second nanoneedles are separated by a solid state dielectric and have ends that are adjacent to one another, and the second nanoneedle is disposed vertically above the first nanoneedle in relation to the base; and
a detection circuit coupled to each of said nanoneedles, wherein the detection circuit is configured to detect a change in impedance between the first and second nanoneedles of each nano-sensor that results from the binding of a target particle passed by the channel to a respective probe.
2. The nano-sensor apparatus of claim 1 , wherein said probe is provided on one of the first and second nanoneedles.
3. The nano-sensor apparatus of claim 1 , wherein the detection circuit is further configured to detect a second particle bound to the target particle passed by the channel.
4. The nano-sensor apparatus of claim 2 , wherein the detection circuit is configured to determine the number of target particles bound to the respective probe.
5. The nano-sensor apparatus of claim 2 , wherein each probe in a first subset of the plurality of nano-sensors is configured to bind to a first type of target particle and each probe in a second subset of the plurality of nano-sensors is configured to bind to a second type of target particle and to not bind to the first type of target particle.
6. The nano-sensor apparatus of claim 2 , wherein the second nanoneedle of each nano-sensor is disposed along a surface of the base.
7. The nano-sensor apparatus of claim 2 , wherein the second nanoneedle of each nano-sensor is disposed parallel in relation to the first nanoneedle of each corresponding nanosensor.
8. The nano-sensor apparatus of claim 2 , wherein the solid state dielectric has a thickness that separates the first and second nanoneedles by 500 nm or less.
9. The nano-sensor apparatus of claim 3 , wherein the second particle is a bead.