Method for manufacturing gallium nitride-based film chip

1. A method for manufacturing gallium nitride-based film chip, the method comprising:

a. growing an n-type GaN layer, an active layer and a p-type GaN layer in turn on a sapphire substrate to form semiconductor multilayer structure;

b thinning and polishing the sapphire substrate;

c. coating a first glue on the semiconductor multilayer structure and solidifying the first glue with a first temporary substrate, wherein thickness of the first glue is between 10 microns and 100 microns, curing temperature is between 80° C. and 160° C., curing time is between 30 minutes and 120 minutes;

d. removing the sapphire substrate via laser, coating a second glue on a peeling surface and solidifying the second glue with a second temporary substrate, wherein thickness of the second glue is between 5 microns and 30 microns, curing temperature is between 120° C. and 180° C., curing time is between 10 minutes and 60 minutes;

e. removing the first temporary substrate and the first glue;

f. bonding the semiconductor multilayer structure with a permanent substrate by eutectic bonding;

g. removing the second temporary substrate and the second glue.

2. The method of claim 1 , wherein a conductive reflecting compound metal layer is coated on the semiconductor multilayer structure by evaporating, then the semiconductor multilayer structure is alloyed, and the alloying temperature is between 400° C. and 600° C. .

3. The method of claim 1 , wherein the eutectic bonding is Au-Sn bonding, the bonding temperature is between 200° C. and 400° C. .