Integration of trench MOS with low voltage integrated circuits
View Patent ↗A high voltage trench MOS and its integration with low voltage integrated circuits. Embodiments include forming a first trench in a substrate, the first trench having a first width; forming a first oxide layer on side surfaces of the first trench; forming a second trench in the substrate, below the first trench, the second trench having a second width less than the first width; forming a second oxide layer on side and bottom surfaces of the second trench; forming spacers on sides of the first and second trenches; removing a portion of the second oxide layer from the bottom surface of the second trench between the spacers; filling the first and second trenches with a first poly-silicon to form a drain region; removing the spacers, exposing side surfaces of the first poly-silicon; forming a third oxide layer on the side surfaces and a top surface of the first poly-silicon; and filling a remainder of the first and second trenches with a second poly-silicon to form a gate region on each side of the drain region.
1. A method comprising:
forming a first trench in a substrate, the first trench having a first width;
forming a first oxide layer on side surfaces of the first trench;
forming a second trench in the substrate, below the first trench, the second trench having a second width less than the first width;
forming a second oxide layer on side and bottom surfaces of the second trench;
forming spacers on sides of the first and second trenches;
removing a portion of the second oxide layer from the bottom surface of the second trench between the spacers;
filling the first and second trenches with a first poly-silicon to form a drain region;
removing an upper portion of the spacers, leaving a lower portion of the spacers and exposing an upper portion of side surfaces of the first poly-silicon;
forming a third oxide layer on the upper portion of the side surfaces and a top surface of the first poly-silicon; and
filling a remainder of the first and second trenches with a second poly-silicon to form a gate region on each side of the drain region.
2. The method according to claim 1 , comprising:
forming nitride spacers on the sides of the first trench after forming the first oxide layer; and
forming the second trench using the nitride spacers as a hard mask.
3. The method according to claim 2 , further comprising:
forming the third oxide layer by oxidizing the first poly-silicon; and
removing the nitride spacers before filling the remainder with the second poly-silicon.
4. The method according to claim 1 , comprising forming the spacers to be 500 Å to 20,000 Å in thickness.
5. The method according to claim 1 , comprising forming the third oxide layer to be 500 Å to 20,000 Å in thickness.
6. The method according to claim 1 , comprising forming the first oxide layer to be 100 Å to 1000 Å in thickness.
7. The method according to claim 1 , further comprising doping the substrate around the second trench, after forming the second trench, to form a drift region.
8. The method according to claim 1 , comprising doping the substrate beneath the bottom surface of the second trench, after forming the spacers, to form a N + region.
9. The method according to claim 1 , comprising:
forming a fourth oxide layer on the substrate after filling the remainder with the second poly-silicon; and
forming a low voltage transistor and/or a medium voltage transistor on the fourth oxide layer.