Assembly including plural through wafer vias, method of cooling the assembly and method of fabricating the assembly

1. An assembly, comprising:

a chip including an integrated circuit;

a casing including an integrated circuit including plural active elements and including:

an upper portion formed on a side of said chip;

a lower portion formed on another side of said chip; and

a cooling inlet and a cooling outlet for transferring a coolant, provided in an upper surface of the casing, and forming outer sidewalls of said upper portion and inner sidewalls of said lower portion;

plural through-wafer vias (TWVs) for electrically connecting said integrated circuit of said chip and said integrated circuit of said casing;

a system board configured to be electrically connected to the casing; and

a plurality of cards connected to said casing for electrically connecting said casing to the system board,

wherein said cards comprises:

an upper card including a wiring electrically connecting said upper portion of said casing to said system board; and

a lower card electrically connecting said lower portion of said casing to said system board, and

wherein, in a cross-sectional view, opposing edges of the upper card are located between vertical planes defined by said outer sidewalls of said upper portion of said casing, said outer sidewalls of said upper portion of said casing are located between vertical planes defined by opposing outer sidewalls of said lower portion of said casing, said opposing outer sidewalls of said lower portion of said casing are located between vertical planes defined by opposing edges of the lower card, and a first edge of the opposing edges of the upper card faces and is spaced apart from a surface of said system board.

2. The assembly of claim 1 , wherein said upper and lower cards are connected to said upper and lower portions of said casing, respectively, by plural solder balls which are aligned with said plural through-wafer vias-such that said plural through-wafer vias are electrically connected to said upper and lower cards.

3. The assembly of claim 2 , wherein said chip further comprises a silicon die formed on said integrated circuit of said chip, said plural through-wafer vias being formed in silicon pillars of said silicon die.

4. The assembly of claim 3 , wherein said chip including said integrated circuit comprises plural chips including plural integrated circuits, said plural chips forming a chip stack.

5. The assembly of claim 4 , further comprising:

a fluid channel formed between an upper surface of a silicon die formed on a first chip in said chip stack, and a lower surface of a second chip formed above said first chip in said chip stack.

6. The assembly of claim 5 , wherein said upper and lower portions of said casing form the coolant inlet for transporting said coolant into said chip stack, and the coolant outlet for transporting said coolant out of said chip stack.

7. The assembly of claim 4 , wherein said integrated circuits of said plural chips and said integrated circuit of said casing collectively form a three dimensional integrated circuit.

8. The assembly of claim 4 , wherein said plural chips in said chip stack comprise different integrated circuits.

9. The assembly of claim 1 , wherein said through-wafer vias comprise first vias that run through said chip and electrically connect said integrated circuit of said chip to said upper casing, and second vias that run through said chip and electrically connect said integrated circuit of said chip to said lower casing.

10. The assembly of claim 9 , wherein said first and second vias are alternately formed such that an interleaving input/output (I/O) is formed above and below said chip.

11. The assembly of claim 1 , wherein said integrated circuit of said chip comprises a microprocessor circuit.

12. The assembly of claim 1 , wherein said integrated circuit of casing comprises an integrated circuit including plural active elements formed on said upper portion of said casing and an integrated circuit including plural active elements formed on said lower portion of said casing.

13. The assembly of claim 1 , wherein said plural through-wafer vias (TWVs) are included in at least one of said upper and lower portions of said casing.

14. The assembly of claim 1 , wherein said system board comprises a single board connected to the lower and upper cards respectively through first and second connectors located in the single board.

15. The assembly of claim 1 , wherein said integrated circuit of said chip comprises a microprocessor circuit,

wherein said chip including said integrated circuit comprises plural chips including plural integrated circuits, said plural chips forming a chip stack, and

wherein said plural chips in said chip stack comprise different integrated circuits.

16. An assembly, comprising:

a chip including an integrated circuit;

a casing including an integrated circuit and including:

an upper portion formed on a side of said chip;

a lower portion formed on another side of said chip; and

a cooling inlet and a cooling outlet for transferring a coolant, provided in an upper surface of the casing, and forming outer sidewalls of said upper portion and inner sidewalls of said lower portion;

plural through-wafer vias (TWVs) for electrically connecting said integrated circuit of said chip and said integrated circuit of said casing;

a system board configured to be electrically connected to the casing; and

a plurality of cards connected-to said casing for electrically connecting said casing to the system board,

wherein said plural through-wafer vias (TWVs) are included in said upper and lower portions of said casing, and

wherein said cards comprise:

an upper card including a wiring electrically connecting said upper portion of said casing to said system board; and

a lower card electrically connecting said lower portion of said casing to said system board, and

wherein, in a cross-sectional view, opposing edges of the upper card are located between vertical planes defined by said outer sidewalls of said upper portion of said casing, said outer sidewalls of said upper portion of said casing are located between vertical planes defined by opposing outer sidewalls of said lower portion of said casing, said opposing outer sidewalls of said lower portion of said casing are located between vertical planes defined by opposing edges of the lower card and a first edge of the opposing edges of the upper card faces and is spaced apart from a surface of said system board.

17. The assembly of claim 16 , wherein said upper and lower cards are connected to said upper and lower portions of said casing, respectively, by plural solder balls which are aligned with said plural through-wafer vias such that said-plural through-wafer vias are electrically connected to said upper and lower cards.

18. The assembly of claim 17 , wherein said chip further comprises a silicon die formed on said integrated circuit of said chip, said plural through-wafer vias being formed in silicon pillars of said silicon die.

19. The assembly of claim 18 , wherein said chip including said integrated circuit comprises plural chips including plural integrated circuits, said plural chips forming a chip stack.

20. The assembly of claim 16 , wherein said integrated circuit of casing comprises an integrated circuit including plural active elements formed on said upper portion of said casing and an integrated circuit including plural active elements formed on said lower portion of said casing.