Method for manufacturing organic semiconductor element, and organic semiconductor element
A method for manufacturing an organic semiconductor element capable of obtaining an organic semiconductor element in which an organic semiconductor layer is patterned without lowering the mobility of the organic semiconductor layer through a simple and easy process, which includes: an organic semiconductor layer formation step; a first dielectric layer formation step of forming a first dielectric layer on the organic semiconductor layer to be positioned at least on a channel region between the source electrode and the drain electrode; and a second dielectric layer formation step, wherein the second dielectric layer has a contact portion contacting the organic semiconductor layer around the first dielectric layer, and a mixed layer in which the organic semiconductor layer and the second dielectric layer are mixed with each other is formed to constitute an interface between the organic semiconductor layer and the second dielectric layer in the contact portion.
1. A method for manufacturing an organic semiconductor element, comprising steps of:
an organic semiconductor layer formation step of forming an organic semiconductor layer to cover a source electrode and a drain electrode;
a first dielectric layer formation step of forming a first dielectric layer on the organic semiconductor layer to be positioned at least on a channel region between the source electrode and the drain electrode; and
a second dielectric layer formation step of forming a second dielectric layer on the organic semiconductor layer to cover the first dielectric layer,
wherein the second dielectric layer has a contact portion contacting the organic semiconductor layer around the first dielectric layer, and
a mixed layer in which the organic semiconductor layer and the second dielectric layer are mixed with each other is formed in an interface between the organic semiconductor layer and the second dielectric layer in the contact portion.
2. The method for manufacturing an organic semiconductor element according to claim 1 , wherein in the second dielectric layer formation step, a second-dielectric-layer-forming coating liquid is coated to form the second dielectric layer.
3. The method for manufacturing an organic semiconductor element according to claim 1 , wherein in the second dielectric layer formation step, a second-dielectric-layer-forming resin is bonded under pressure to form the second dielectric layer.
4. The method for manufacturing an organic semiconductor element according to claim 1 , comprising, before the organic semiconductor layer formation step, a source electrode and drain electrode formation step of using an electrode laminated body having a substrate, a gate electrode formed on the substrate, and a gate insulating layer formed on the substrate to cover the gate electrode, and forming the source electrode and the drain electrode on the gate insulating layer of the electrode laminated body.
5. A method for manufacturing an organic semiconductor element, comprising steps of:
an organic semiconductor layer formation step of forming an organic semiconductor layer to cover a source electrode and a drain electrode; and
a first dielectric layer and second dielectric layer formation step of using a dielectric layer laminated body in which a first dielectric layer is formed on a second-dielectric-layer-forming resin, and bonding the dielectric layer laminated body under pressure to arrange the first dielectric layer on the organic semiconductor layer to be positioned at least on a channel region between the source electrode and the drain electrode, thereby forming a second dielectric layer on the organic semiconductor layer to cover the first dielectric layer,
wherein the second dielectric layer has a contact portion contacting the organic semiconductor layer around the first dielectric layer, and
a mixed layer in which the organic semiconductor layer and the second dielectric layer are mixed with each other is formed in an interface between the organic semiconductor layer and the second dielectric layer in the contact portion.
6. The method for manufacturing an organic semiconductor element according to claim 5 , comprising, before the organic semiconductor layer formation step, a source electrode and drain electrode formation step of using an electrode laminated body having a substrate, a gate electrode formed on the substrate, and a gate insulating layer formed on the substrate to cover the gate electrode, and forming the source electrode and the drain electrode on the gate insulating layer of the electrode laminated body.
7. An organic semiconductor element comprising:
a source electrode and a drain electrode;
an organic semiconductor layer formed to cover the source electrode and the drain electrode;
a first dielectric layer formed on the organic semiconductor layer to be positioned at least on a channel region between the source electrode and the drain electrode; and
a second dielectric layer formed on the organic semiconductor layer to cover the first dielectric layer,
wherein the second dielectric layer has a contact portion contacting the organic semiconductor layer around the first dielectric layer, and
a mixed layer in which the organic semiconductor layer and the second dielectric layer are mixed with each other is formed in an interface between the organic semiconductor layer and the second dielectric layer in the contact portion.
8. The organic semiconductor element according to claim 7 , comprising an electrode laminated body having a substrate, a gate electrode formed on the substrate, and a gate insulating layer formed on the substrate to cover the gate electrode, and
wherein the source electrode and the drain electrode are formed on the gate insulating layer of the electrode laminated body.