Semiconductor device and microphone
A package is formed by vertically stacking a cover and a substrate. A microphone chip is mounted at the top surface of a concave portion provided to the cover, and a circuit element is mounted on the upper surface of the substrate. The microphone chip is connected to a pad on the lower surface of the cover by a bonding wire. The circuit element is connected to a pad on the upper surface of the substrate by a bonding wire. A cover-side joining portion in conduction with the pad on the lower surface of the cover, and a substrate-side joining portion in conduction with the pad on the upper surface of the substrate, are joined by a conductive material. A conductive layer for electromagnetic shielding is embedded inside the cover near the bonding pad and the cover-side joining portion.
1. A semiconductor device comprising:
a package formed from a first member and a second member, wherein a concave portion is formed on an inner surface of at least one member of the first member and the second member;
a sensor mounted on an inner surface of the first member;
a circuit element mounted on an inner surface of the second member; and
electrical connection means configured to electrically connect the sensor and the circuit element through a joining portion of the first member and the second member,
wherein the at least one member of the first member and the second member comprising the concave portion, is configured by adhering together a main member and an auxiliary member,
the main member includes a concave part, and a conductive layer for electromagnetic shielding on a surface for adhering to the auxiliary member,
the auxiliary member includes an opening, and is adhered to the main member by being stacked on the conductive layer for electromagnetic shielding, and
the concave portion is formed from the concave part and the opening, and
the conductive layer for electromagnetic shielding is provided near a part of the joining portion of the first member and the second member through which the electrical connection means is passed.
2. The semiconductor device according to claim 1 , wherein the conductive layer for electromagnetic shielding is provided to at least one member of the first member and the second member, and is in parallel with a surface of the joining portion to the other member.
3. The semiconductor device according to claim 1 , wherein the conductive layer for electromagnetic shielding is provided to at least one member of the first member and the second member, and is on a side farther away from the other member than the joining portion to the other member.
4. The semiconductor device according to claim 1 , wherein the conductive layer for electromagnetic shielding is embedded in at least one member of the first member and the second member.
5. The semiconductor device according to claim 1 , wherein the conductive layer for electromagnetic shielding is provided to the at least one member of the first member and the second member comprising the concave portion, and is in a periphery of the concave portion.
6. The semiconductor device according to claim 5 ,
wherein a first conductive layer is formed on a top surface or on a bottom surface of the concave portion, and a second conductive layer is formed on an inner peripheral wall surface of the concave portion, and
the first conductive layer, the second conductive layer, and the conductive layer for electromagnetic shielding are in conduction with one another.
7. A microphone, wherein a microphone chip is used as the sensor of the semiconductor device of claim 1 , and an acoustic perforation is provided on one member of the first member and the second member.