Magnetic medium with an orientation control layer
View Patent ↗Provided is a magnetic recording medium which maintains high vertical orientation of a vertical magnetic layer, and which is capable of realizing high recording densification. In the magnetic recording medium, at least a soft magnetic underlying layer ( 30 ), seed layers ( 31, 32 ), an orientation control layer ( 33 ), and a vertical magnetic layer are laminated in this order on the non-magnetic substrate. The soft magnetic underlying layer ( 30 ) has an amorphous or microcrystalline structure. The seed layers ( 31, 32 ) include a first seed layer ( 31 ) formed from a metal oxide or a metal nitride, and a second seed layer ( 32 ) which is formed on the first seed layer and is formed from a metal formed with an island-shape or a net shape. In the orientation control layer ( 33 ) and the vertical magnetic layer, respective crystal grains constitute columnar crystals that are continuous in a thickness direction based on the second seed layer ( 32 ).
1. A magnetic recording medium having at least a configuration in which a soft magnetic underlying layer, a seed layer, an orientation control layer, and a vertical magnetic layer are laminated on a non-magnetic substrate in this order,
wherein the soft magnetic underlying layer has an amorphous or microcrystalline structure,
the seed layer includes a first seed layer formed from a metal oxide or a metal nitride, and a second seed layer which is formed on the first seed layer and is formed from a metal formed with an island-shape or a net shape, wherein
the first seed layer contains any one selected from the group consisting of CrN, TiN, AlN, ZnO, TiO and MgO,
the second seed layer contains any one selected from the group consisting of Cu, Au and Ag,
in the orientation control layer and the vertical magnetic layer, respective crystal grains constitute columnar crystals that are continuous in a thickness direction based on the second seed layer, and
the vertical magnetic layer comprises a layer which contains Co as a main component and further contains at least one oxide selected from the group consisting of oxides of Cr, Si, Ta, Al, Ti, Mg and Co.
2. The magnetic recording medium according to claim 1 ,
wherein the first seed layer contains ZnO or AN.
3. The magnetic recording medium according to claim 1 ,
wherein the film thickness of the first seed layer is within a range of 0.4 nm to 10 nm.
4. The magnetic recording medium according to claim 1 ,
wherein the second seed layer contains Au or Ag.
5. The magnetic recording medium according to claim 1 ,
wherein the orientation control layer contains any one kind selected from a group consisting of Ru, a Ru alloy, and a CoCr alloy.
6. The magnetic recording medium according to claim 5 ,
wherein the orientation control layer contains Ru.
7. A method of manufacturing a magnetic recording medium having at least a configuration in which a soft magnetic underlying layer, a seed layer, an orientation control layer, and a vertical magnetic layer are laminated on a non-magnetic substrate in this order,
wherein the soft magnetic underlying layer is made to have an amorphous or microcrystalline structure,
the seed layer is made to have a structure that includes a first seed layer formed from a metal oxide or a metal nitride, and a second seed layer which is formed on the first seed layer and is formed from a metal formed with an island-shape or a net shape, wherein the first seed layer contains any one selected from the group consisting of CrN, TiN, AlN, ZnO, TiO and MgO, and the second seed layer contains any one selected from the group consisting of Cu, Au and Ag, and
the respective layers are subjected to crystal growth in such a manner that crystal grains constituting the orientation control layer and the vertical magnetic layer form columnar crystals that are continuous in a thickness direction based on the second seed layer, wherein the vertical magnetic layer comprises a layer which contains Co as a main component and further contains at least one oxide selected from a group consisting of oxides of Cr, Si, Ta, Al, Ti, Mg and Co.
8. A magnetic recording and reproducing device, comprising:
the magnetic recording medium according to claim 1 , or the magnetic recording medium that is manufactured by the manufacturing method according to claim 7 ; and
a magnetic head that performs recording and reproduction of information with respect to the magnetic recording medium.