Plasma microwave resonant cavity
View Patent ↗A plasma microwave resonant cavity used for a plasma chemical vapor deposition (PCVD) apparatus comprises a resonant cavity housing and a waveguide device connected with the cavity housing. Two ends of the cavity housing are provided with coaxial through-holes along the axial direction of the cavity. A glass inner liner is arranged through the through-holes at the two ends, and runs through a cavity body and the through holes at the two ends. The glass inner liner comprises a glass cylinder and glass stop rings arranged at the two ends of the glass cylinder. One or two ends of the glass cylinder are provided with external threads. The glass stop rings are connected with the ends of the glass cylinder by screw holes formed on the glass stop rings.
1. A plasma microwave resonant cavity, comprising:
a resonant cavity housing; and
a waveguide device connected to the resonant cavity housing,
wherein coaxial through-holes are defined on two ends of the resonant cavity housing along an axial direction of the resonant cavity;
wherein a glass inner liner is disposed via the through-holes at the two ends and penetrates the body of the resonant cavity and the through-holes at the two ends, wherein the glass inner liner comprises a glass cylinder and a glass stop ring disposed at two ends of the glass cylinder;
wherein an external thread is provided at one or two ends of the glass cylinder, and wherein the glass stop ring is connected to an end of the glass cylinder through a screw hole disposed therein.
2. The plasma microwave resonant cavity according to claim 1 , wherein one end of the glass cylinder is provided with a fixed glass stop ring integrally connected thereto, and the other end of the glass cylinder is provided with an external thread and connected to a screw hole of the glass stop ring to form the glass stop ring with threaded connection at one end.
3. The plasma microwave resonant cavity according to claim 2 , wherein both the glass cylinder and the glass stop ring are made of quartz glass.
4. The plasma microwave resonant cavity according to claim 2 , wherein the diameter of the glass cylinder ranges from 30 mm to 80 mm, the external thread provided at the end of the glass cylinder is a fine thread with a pitch of 3 mm to 0.85 mm, and the axial length of the whole external thread ranges from 10 mm to 20 mm.
5. The plasma microwave resonant cavity according to claim 2 , wherein the glass stop ring is in an annular shape and the screw hole of the glass stop ring is fitted with the external thread of the glass cylinder, the axial thickness of the glass stop ring ranges from 3 mm to 15 mm, and a radial single-side width of the annular body ranges from 10 mm to 35 mm.
6. The plasma microwave resonant cavity according to claim 2 , wherein a movable glass retaining ring is fitted on an inner side of the glass stop ring at one or two ends of the glass cylinder.
7. The plasma microwave resonant cavity according to claim 2 , wherein the resonant cavity housing is a cylindrical resonant cavity housing or coaxial resonant cavity housing.
8. The plasma microwave resonant cavity according to claim 1 , wherein both the glass cylinder and the glass stop ring are made of quartz glass.
9. The plasma microwave resonant cavity according to claim 1 , wherein the diameter of the glass cylinder ranges from 30 mm to 80 mm, the external thread provided at the end of the glass cylinder is a fine thread with a pitch of 3 mm to 0.85 mm, and the axial length of the whole external thread ranges from 10 mm to 20 mm.
10. The plasma microwave resonant cavity according to claim 1 , wherein the glass stop ring is in an annular shape and the screw hole of the glass stop ring is fitted with the external thread of the glass cylinder, the axial thickness of the glass stop ring ranges from 3 mm to 15 mm, and a radial single-side width of the annular body ranges from 10 mm to 35 mm.
11. The plasma microwave resonant cavity according to claim 1 , wherein a movable glass retaining ring is fitted on an inner side of the glass stop ring at one or two ends of the glass cylinder.
12. The plasma microwave resonant cavity according to claim 1 , wherein the resonant cavity housing is a cylindrical resonant cavity housing or coaxial resonant cavity housing.