Sensor for differential calorimetric measurement, and method for manufacturing same

1. A differential calorimetric measurement sensor comprising:

two cells, a thermometric cell and another cell, each cell comprising:

a membrane made of a material with low thermal conductivity, with a first face and a second face, and

support means for the membrane, made of a material exhibiting a high thermal diffusivity coefficient, in contact with the first face of the membrane;

the thermometric cell comprising at least two active thermometric elements situated on the first face of the membrane and the two cells configured to be assembled such that the second faces of the membranes of the cells are facing one another, a sample and a reference used to perform the measurement configured to be placed between the two membranes and directly in contact with the second faces, and

at least one of the cells comprising a closure means facing the first face of the membrane, a free space being formed between the closure means and the membrane for a gas, the closure means each including a piercing being in communication with the free space, and a height of the closure means being adapted in such a way as to create a thermal conduction of predetermined value via the gas between the membrane and the closure means.

2. The sensor as claimed in claim 1 , in which the other cell is a heating cell, at least two active heating elements being situated on the first face of the membrane of the other cell, such that each of the active heating elements is substantially aligned with one of the active thermometric elements of the thermometric cell, when the two cells are assembled together, a sample and a reference used to perform the measurement then configured to be placed between two active elements of each of the two cells.

3. The sensor as claimed in claim 1 , in which the second face of the membrane of at least one cell comprises, facing the at least two active elements, a layer made of a material exhibiting a high thermal conductivity.

4. The sensor as claimed in claim 1 , in which the support means is situated at a periphery of the membrane.

5. The sensor as claimed in claim 1 , in which the active elements of each cell are coated in a layer of electrically insulating material.

6. A differential calorimeter comprising:

a measurement sensor as claimed in claim 1 ;

an oven provided in which the sensor is arranged; and

a cooling means, said cooling means consisting of the gas, which is in fluid communication with the free space for obtaining thermal conduction between an external environment and the sample and the reference.

7. A method for manufacturing a measurement sensor as claimed in claim 1 , producing two cells, a thermometric cell and another cell, the thermometric cell comprising a membrane made of a material with low thermal conductivity, the method comprising:

(a 1 ) producing at least two active elements simultaneously on a first face of the membrane;

(a 2 ) fixing support means exhibiting a high thermal diffusivity coefficient onto the first face of the membrane;

the other cell being obtained by performing the (a 2 ) and the cells configured to be assembled together, such that the second faces of the respective membranes of the cells are facing one another.

8. The method as claimed in claim 7 , in which, prior to (a 1 ), performing (a 0 ) in which the membrane is fixed onto a ring made of ceramic material, the ring being in contact with the second face of the membrane, the method carrying out (a 2 ) after the (a 1 ), then performing (a 3 ) in which the ring is removed.

9. The method as claimed in claim 8 , in which the other cell is a heating cell which is obtained by implementing the (a 1 ) and (a 2 ), at least two active heating elements being produced during the (a 1 ).

10. The method as claimed in claim 7 , further comprising a complementary operation depositing, after the (a 1 ), a layer of electrically insulating resin, so as to coat the active elements of at least one of the two cells.

11. The method as claimed in claim 7 , further comprising a complementary operation, after the (a 1 ), of depositing, on the second face of a membrane of at least one of the two cells, and facing a corresponding active element, a layer exhibiting a high thermal conductivity.

12. The method as claimed in claim 7 , in which, for production of the thermometric cell, the (a 1 ) comprises:

(b 1 ) deposition of a layer of metal;

(b 2 ) a lithography; and

(b 3 ) an ionic etching.

13. The method as claimed in claim 7 , in which, for the production of a heating cell, the (a 1 ) comprises:

(b′ 1 ) deposition of a layer of metal;

(b′ 2 ) a lithography; and

(b′ 3 ) a wet etching.

14. The method as claimed in claim 8 , in which the other cell is a heating cell which is obtained by further implementing the (a 0 ) and (a 3 ).