Capacitor and preparation method thereof
A capacitor and a method of fabricating thereof are provided. A structure of low pressure tetraethyl orthosilicate—low pressure silicon nitride—low pressure tetraethyl orthosilicate is used in the capacitor to replace the oxide-nitride-oxide structure of the existing capacitor; the capacitor has a relatively high unit capacitance value. Furthermore, the structure of low pressure tetraethyl orthosilicate—low pressure silicon nitride—low pressure tetraethyl orthosilicate is fabricaited by low pressure chemical vapor deposition method at relatively low temperature; thus the heat produced in the whole process is relatively low, which is insufficient to make the semiconductor device shift or make the gate metal layer or the metallized silicon layer peel off. Accordingly, the capacitor and the method of fabricating the capacitor of the present invention can be well applied in the process of the 0.5 μm PIP capacitor or below 0.5 μm.
1. A capacitor, comprising:
an upper conductive plate, a lower conductive plate, and an intermediate dielectric layer; wherein the intermediate dielectric layer comprises:
a first low pressure tetraethyl orthosilicate layer disposed on the lower conductive plate;
a low pressure silicon nitride layer disposed on the first low pressure tetraethyl orthosilicate layer; and
a second low pressure tetraethyl orthosilicate layer disposed on the low pressure silicon nitride layer, wherein the second low pressure tetraethyl orthosilicate layer is disposed below the upper conductive plate, wherein the capacitor provides a capacitance of at least 1.7 fF/μm 2 .
2. The capacitor according to claim 1 , wherein the lower conductive plate is a first polysilicon layer, the upper conductive plate is a second polysilicon layer.
3. The capacitor according to claim 2 , wherein the lower conductive plate further comprises a metal layer or a metallized silicon layer disposed between the first polysilicon layer and the first low pressure tetraethyl orthosilicate layer.
4. The capacitor according to claim 3 , wherein the metal layer or the metallized silicon layer is made of one selected from the group consisting of aluminum, tungsten, and tungsten silicide.
5. The capacitor according to claim 1 , wherein the capacitor is disposed on a semiconductor substrate having a gate oxide layer and a gate polysilicon layer, the lower conductive plate of the capacitor is the gate polysilicon layer on the semiconductor substrate.
6. A capacitor, comprising:
an upper conductive plate, a lower conductive plate, and an intermediate dielectric layer; wherein the intermediate dielectric layer comprises:
a first low pressure tetraethyl orthosilicate layer disposed on the lower conductive plate;
a low pressure silicon nitride layer disposed on the first low pressure tetraethyl orthosilicate layer; and
a second low pressure tetraethyl orthosilicate layer disposed on the low pressure silicon nitride layer, wherein the second low pressure tetraethyl orthosilicate layer is disposed below the upper conductive plate, wherein the capacitor maintains charge for voltages in excess of 15 volts.
7. The capacitor of claim 1 , wherein the total width of all layers of the capacitor is less than 0.5 μm.
8. The capacitor of claim 6 , wherein the total width of all layers of the capacitor is less than 0.5 μm.
9. A capacitor, comprising:
an upper conductive plate, a lower conductive plate, and an intermediate dielectric layer; wherein the intermediate dielectric layer comprises:
a first low pressure tetraethyl orthosilicate layer disposed on the lower conductive plate;
a metal layer or a metallized silicon layer disposed the first low pressure tetraethyl orthosilicate layer;
a low pressure silicon nitride layer disposed on the metal layer or a metallized silicon layer; and
a second low pressure tetraethyl orthosilicate layer disposed on the low pressure silicon nitride layer and disposed below the upper conductive plate.