Nitride semiconductor device
View Patent ↗A nitride semiconductor device includes first electrode interconnect layers and second electrode interconnect layers formed over a nitride semiconductor layer, a first insulating film formed on the first and second electrode interconnect layers and including first openings, first interconnect layers and second interconnect layers formed on the first insulating film and respectively connected to the first electrode interconnect layers and the second electrode interconnection layers through the first openings, a second insulating film formed on the first and second interconnect layers and including second openings, and a first pad layer and a second pad layer formed on the second insulating film and respectively connected to the first interconnect layers and the second interconnect layers through the second openings.
1. A nitride semiconductor device comprising:
a substrate;
a nitride semiconductor layer formed over the substrate and including an active region;
first electrode interconnect layers and second electrode interconnect layers alternately spaced from one another over the active region of the nitride semiconductor layer;
a first insulating film formed on the first and second electrode interconnect layers, and including a plurality of first openings through which the first and second electrode interconnect layers are exposed;
first interconnect layers and second interconnect layers alternately spaced from one another on the first insulating film, the first interconnect layers being in electrical connection to the first electrode interconnect layers through associated ones of the first openings and extending in a direction intersecting with the first electrode interconnect layers, the second interconnect layers being in electrical connection to the second electrode interconnect layers through associated ones of the first openings and extending in a direction intersecting with the second electrode interconnect layers;
a second insulating film formed on the first and second interconnect layers, and including a plurality of second openings through which the first and second interconnect layers are exposed; and
a first pad layer and a second pad layer spaced from each other on the second insulating film and located above the active region, the first pad layer being in electrical connection to the first interconnect layers through associated ones of the second openings, the second pad layer being in electrical connection to the second interconnect layers through associated ones of the second openings.
2. The nitride semiconductor device of claim 1 , wherein
each of the first interconnect layers and the second interconnect layers includes a plurality of metal layers.
3. The nitride semiconductor device of claim 2 , wherein
in each of the first interconnect layers and the second interconnect layers, an uppermost metal layer is more adhesive to the second insulating layer than to a lower metal layer which is in contact with the uppermost metal layer.
4. The nitride semiconductor device of claim 2 , wherein
each of the first interconnect layers and the second interconnect layers includes a first metal layer being in contact with the first insulating film, a second metal layer formed on the first metal layer, and a third metal layer which is an uppermost layer formed on the second metal layer,
the first metal layer is more adhesive to the first insulating film than to the second and third metal layers,
the second metal layer is made of a metal whose conductivity is higher than that of the first metal layer, and
the third metal layer is more adhesive to the second insulting film than to the first and second metal layers.
5. The nitride semiconductor device of claim 2 , wherein
an uppermost metal layer of each of the first interconnect layers and the second interconnect layers has a glossiness of 1 or more.
6. The nitride semiconductor device of claim 1 , wherein
each of the first pad layer and the second pad layer includes a plurality of pad layers which are at an identical potential, and
the plurality of pad layers are each in connection to an external device.
7. The nitride semiconductor device of claim 1 , wherein
each of the first pad layer and the second pad layer includes a plurality of metal layers.
8. The nitride semiconductor device of claim 1 , wherein
each of the first and second electrode interconnect layers includes an electrode which is located on and in direct connection to the nitride semiconductor layer, and an electrode interconnect formed on the electrode,
an electrode insulating film including openings through which the electrodes included in the first and second electrode interconnect layers are exposed is formed on the nitride semiconductor layer, and
the electrode interconnects included in the first and second electrode interconnect layers are in electrical connect to the electrodes through the openings of the electrode insulating film.