Methods for processing semiconductor devices
Methods of forming semiconductor structures include providing a polymeric material over a carrier substrate, bonding another substrate to the polymeric material, and lowering a temperature of the polymeric material to below about 15° C. to separate the another substrate from the carrier substrate. Some methods include forming a polymeric material over a first substrate, securing a second substrate to the first substrate over the polymeric material, cooling the polymeric material to a temperature below a glass transition temperature of the polymeric material, and separating the second substrate from the first substrate. Semiconductor structures may include a polymeric material over at least a portion of a first substrate, an adhesive material over the polymeric material, and a second substrate over the adhesive material. The polymeric material may have a glass transition temperature of about 10° C. or lower and a melting point of about 100° C. or greater.
1. A method of processing a semiconductor structure, comprising:
providing a first polymeric material over a carrier substrate and providing a second polymeric material over the first polymeric material, the first and second polymeric materials exhibiting a melting point of between about 100° C. and about 500° C. and a glass transition temperature of about 15° C. or lower and the second polymeric material exhibiting a different coefficient of thermal expansion than the first polymeric material;
bonding another substrate to the second polymeric material; and
lowering a temperature to below the glass transition temperature of at least one of the first or second polymeric materials to separate the another substrate from the carrier substrate.
2. The method of claim 1 , wherein lowering a temperature to below the glass transition temperature of at least one of the first or second polymeric materials to separate the another substrate from the carrier substrate comprises increasing a brittleness of the at least one of the first or second polymeric materials.
3. The method of claim 1 , wherein providing a first polymeric material over a carrier substrate comprises providing a first polymeric material having a glass transition temperature of about 10° C. or lower over the carrier substrate.
4. The method of claim 1 , wherein providing a second polymeric material over the first polymeric material comprises providing an adhesive material adjacent the first polymeric material before bonding the another substrate to the second polymeric material.
5. The method of claim 4 , wherein lowering a temperature to below the glass transition temperature of at least one of the first or second polymeric materials to separate the another substrate from the carrier substrate comprises inducing stress at an interface of the first polymeric material and the second polymeric material.
6. The method of claim 1 , wherein lowering a temperature to below the glass transition temperature of at least one of the first or second polymeric materials to separate the another substrate from the carrier substrate comprises delaminating at least a portion of the at least on of the first or second polymeric materials from at least one of the carrier substrate and the another substrate.
7. The method of claim 1 , wherein providing a first polymeric material over a carrier substrate and providing a second polymeric material over the first polymeric material comprises providing the first polymeric material in a pattern over the carrier substrate and providing the second polymeric material over the first polymeric material and over an exposed portion of the carrier substrate.
8. The method of claim 1 , wherein lowering a temperature to below the glass transition temperature of at least one of the first or second polymeric materials to separate the another substrate from the carrier substrate comprises lowering the temperature of the at least one of the first or second polymeric materials to a temperature of about 10° C. or lower.
9. The method of claim 8 , wherein lowering a temperature to below the glass transition temperature of at least one of the first or second polymeric materials to separate the another substrate from the carrier substrate comprises lowering the temperature of the at least one of the first or second polymeric materials to a temperature of about 0° C. or lower.
10. The method of claim 1 , wherein providing a second polymeric material over the first polymeric material comprises selecting the second polymeric material to exhibit a glass transition temperature at least 10° C. different from the glass transition temperature of the first polymeric material.
11. The method of claim 1 , wherein providing a second polymeric material over the first polymeric material comprises selecting the second polymeric material to exhibit a glass transition temperature at least 10° C. lower than the glass transition temperature of the first polymeric material.
12. The method of claim 1 , further comprising applying at least one of a shear force or vibration to at least one of the carrier substrate and the another substrate.
13. A method of processing a semiconductor structure, comprising:
providing a first polymeric material over a carrier substrate and providing a second polymeric material over the first polymeric material, the first and second polymeric materials exhibiting a melting point of between about 100° C. and about 500° C. and a glass transition temperature of about 15° C. or lower and the second polymeric material exhibiting a different coefficient of thermal expansion than the first polymeric material;
bonding another substrate to the second polymeric material;
dicing the another substrate to form a plurality of semiconductor dice; and
lowering a temperature to below the glass transition temperature of at least one of the first or second polymeric materials after dicing the another substrate to separate the plurality of semiconductor dice from the carrier substrate.
14. The method of claim 13 , wherein lowering a temperature to below the glass transition temperature of at least one of the first or second polymeric materials to separate the another substrate from the carrier substrate comprises individually removing the semiconductor dice with a cooled pickup head.
15. A method of processing a semiconductor structure, comprising:
forming a first polymeric material over a first substrate and forming a second polymeric material over the first polymeric material, the first and second polymeric materials exhibiting a melting point of between about 100° C. and about 500° C. and a glass transition temperature of about 10° C. or lower and the second polymeric material exhibiting a different coefficient of thermal expansion than the first polymeric material;
securing a second substrate to the first substrate over the second polymeric material; and
cooling at least one of the first or second polymeric materials to a temperature below the glass transition temperature of the at least one of the first or second polymeric materials to separate the second substrate from the first substrate.