IP Library Granted Patent US 9,419,047
Granted Patent B2
US 9,419,047 · App. 14/135,743 · Granted Aug 16, 2016

Image sensor device with aligned IR filter and dielectric layer and related methods

Inventor: Jing-En Luan (Shenzhen, CN)
Assignee: STMICROELECTRONICS (SHENZHEN) R&D CO., LTD.
H01L27/14683H01L27/14618H04N5/2254H04N5/2257H01L2224/13H01L2224/73265
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Quick Facts
Patent No.
US 9,419,047
App. No.
14/135,743
Granted
Aug 16, 2016
Kind
B2
Abstract

An image sensor device may include an interconnect layer, an image sensor IC adjacent the interconnect layer and having an image sensing surface, and a dielectric layer adjacent the image sensor IC and having an opening therein aligned with the image sensing surface. The image sensor device may also include an IR filter adjacent and aligned with the image sensing surface, and an encapsulation material adjacent the dielectric layer and laterally surrounding the IR filter.

Claims (40)

1. An image sensor device comprising:

an interconnect layer comprising a first dielectric layer, and a plurality of electrically conductive vias extending through said first dielectric layer;

an image sensor integrated circuit (IC) adjacent said interconnect layer and having an image sensing surface;

at least one second dielectric layer adjacent said image sensor IC and having an opening therein aligned with the image sensing surface;

an infrared (IR) filter adjacent and aligned with the image sensing surface; and

an encapsulation material adjacent said at least one second dielectric layer and laterally contacting said IR filter around the periphery thereof.

2. The image sensor device of claim 1 further comprising a lens assembly adjacent said encapsulation material and aligned with said IR filter.

3. The image sensor device of claim 2 wherein said encapsulation material comprises a plurality of electrically conductive vias extending therethrough and being coupled to said lens assembly.

4. The image sensor device of claim 1 wherein said image sensor IC comprises a semiconductor substrate, and a plurality of electrically conductive vias extending therethrough.

5. The image sensor device of claim 4 further comprising an adhesive layer between said image sensor IC and said at least one second dielectric layer, said adhesive layer comprising an electrically conductive material portion coupled to at least one of said plurality of electrically conductive vias of said image sensor IC.

6. The image sensor device of claim 1 wherein said at least one second dielectric layer comprises at least one electrically conductive via therein; and further comprising a capacitor in said encapsulation material and being coupled to said at least one electrically conductive via of said at least one second dielectric layer.

7. The image sensor device of claim 1 wherein said image sensor IC comprises a plurality of micro lenses over said image sensing surface.

8. The image sensor device of claim 1 further comprising a plurality of contacts coupled respectively to said plurality of electrically conductive vias.

9. The image sensor device of claim 8 wherein said plurality of contacts comprises a plurality of ball grid array contacts.

10. An image sensor device comprising:

an interconnect layer comprising a first dielectric layer, and a plurality of electrically conductive vias extending through said first dielectric layer;

an image sensor integrated circuit (IC) adjacent said interconnect layer and comprising an image sensing surface, and a plurality of micro lenses over said image sensing surface;

at least one second dielectric layer adjacent said image sensor IC and having an opening therein aligned with the image sensing surface;

an infrared (IR) filter adjacent and aligned with the image sensing surface;

an encapsulation material adjacent said at least one second dielectric layer and laterally contacting said IR filter around the periphery thereof; and

a lens assembly adjacent said encapsulation material and aligned with said IR filter.

11. The image sensor device of claim 10 wherein said encapsulation material comprises a plurality of electrically conductive vias extending therethrough and being coupled to said lens assembly.

12. The image sensor device of claim 10 wherein said image sensor IC comprises a semiconductor substrate, and a plurality of electrically conductive vias extending therethrough.

13. The image sensor device of claim 12 further comprising an adhesive layer between said image sensor IC and said at least one second dielectric layer, said adhesive layer comprising an electrically conductive material portion coupled to at least one of said plurality of electrically conductive vias of said image sensor IC.

14. The image sensor device of claim 10 wherein said at least one second dielectric layer comprises at least one electrically conductive via therein; and further comprising a capacitor in said encapsulation material and being coupled to said at least one electrically conductive via of said at least one second dielectric layer.

15. The image sensor device of claim 10 further comprising a plurality of contacts coupled respectively to said plurality of electrically conductive vias.

16. A method of making an image sensor device comprising:

forming an interconnect layer comprising a first dielectric layer, and a plurality of electrically conductive vias extending through the first dielectric layer;

positioning an image sensor integrated circuit (IC) adjacent the interconnect layer and having an image sensing surface;

forming at least one second dielectric layer adjacent the image sensor IC and having an opening therein aligned with the image sensing surface;

positioning an infrared (IR) filter adjacent and aligned with the image sensing surface; and

forming an encapsulation material adjacent the at least one second dielectric layer and laterally contacting the IR filter around the periphery thereof.

17. The method of claim 16 further comprising positioning a lens assembly adjacent the encapsulation material and aligned with the IR filter.

18. The method of claim 17 further comprising forming the encapsulation material to comprise a plurality of electrically conductive vias extending therethrough and to be coupled to the lens assembly.

19. The method of claim 16 wherein the image sensor IC comprises a semiconductor substrate, and a plurality of electrically conductive vias extending therethrough.

20. The method of claim 19 further comprising forming an adhesive layer between the image sensor IC and the at least one second dielectric layer, the adhesive layer comprising an electrically conductive material portion to be coupled to at least one of the plurality of electrically conductive vias of the image sensor IC.

21. The method of claim 16 wherein the at least one second dielectric layer comprises at least one electrically conductive via therein; and further comprising positioning a capacitor in the encapsulation material and to be coupled to the at least one electrically conductive via of the at least one second dielectric layer.

22. The method of claim 16 wherein the image sensor IC comprises a plurality of micro lenses over the image sensing surface.

23. The method of claim 16 further comprising forming a plurality of contacts coupled respectively to the plurality of electrically conductive vias.

24. The method of claim 23 wherein the plurality of contacts comprises a plurality of ball grid array contacts.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 19, 2015
From: STMICROELECTRONICS (SHENZHEN) MANUFACTURING CO., LTD.
To: STMICROELECTRONICS (SHENZHEN) R&D CO., LTD.
Reel/Frame 034744/0460 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 25, 2014
From: LUAN, JING-EN
To: STMICROELECTRONICS (SHENZHEN) MANUFACTURING CO., LTD.
Reel/Frame 032519/0041 →
Priority Claims (1)
CN 2012 1 0596240 · Dec 31, 2012 · national
Continuity (1)
Related Publication 20140184809A1 · Jul 3, 2014