Group III-V substrate material with thin buffer layer and methods of making
A substrate comprises a Group III-V material having an upper surface and a buffer layer having a thickness of not greater than about 1.3 μm and overlying the upper surface of the substrate. A plurality of optoelectronic devices formed on the substrate having a normalized light emission wavelength standard deviation of not greater than about 0.0641 nm/cm 2 at a wavelength within a range of between about 400 nm to about 550 nm.
1. A substrate comprising:
a body comprising a Group III-V material and having an upper surface; and
a buffer layer comprising a Group III-V material adjacent the upper surface of the body, wherein the buffer layer has an average thickness within a range of between at least about 0.1 μm to not greater than about 0.8 μm,
wherein the substrate is configured to provide a surface for formation of a plurality of optoelectronic devices overlying the buffer layer and having a normalized light emission wavelength standard deviation (nσ) of no greater than about 0.0641 nm/cm 2 at a wavelength within a range of between about 400 nm to about 550 nm.
2. The substrate of claim 1 , wherein the substrate has a surface area within a range of between at least about 20.2 cm 2 to not greater than about 730.6 cm 2 .
3. The substrate of claim 1 , wherein the body comprises gallium nitride.
4. The substrate of claim 1 , wherein the buffer layer comprises gallium nitride.
5. The substrate of claim 1 , wherein the buffer layer consists essentially of gallium nitride.
6. The substrate of claim 1 , wherein the substrate has a diameter of at least about 2 inches (5.1 cm).
7. A substrate structure comprising:
a substrate comprising a Group III-V material having an upper surface;
a buffer layer comprising a Group III-V material adjacent the upper surface of the substrate, wherein the buffer layer has an average thickness within a range of between at least about 0.1 μm to not greater than about 0.8 μm; and
a plurality of optoelectronic devices disposed on the buffer layer, wherein the plurality of optoelectronic devices have a normalized light emission wavelength standard deviation (nσ) of not greater than about 0.0641 nm/cm 2 at a wavelength within a range of between about 400 nm to about 550 nm.
8. The substrate structure of claim 7 , wherein nσ is light emission wavelength standard deviation normalized for surface area of the substrate, the substrate having a diameter of at least about 2 inches (5.1 cm).
9. The substrate of claim 7 , wherein the substrate has a surface area within a range of between at least about 20.2 cm 2 to not greater than about 730.6 cm 2 .
10. The substrate of claim 7 , wherein the light emission wavelength standard deviation (σ) is not greater than about 1.3 nm.
11. The substrate of claim 7 , wherein the buffer layer has an average thickness within a range of between at least about 0.2 μm to not greater than about 0.7 μm.
12. The substrate of claim 7 , wherein the substrate comprises an offcut angle (α) defined between the upper surface and a crystallographic reference plane, and an offcut angle variation (2β) of not greater than about 1 degrees.
13. The substrate of claim 7 , wherein the plurality of optoelectronic devices comprises a Group III-V material.
14. The substrate of claim 7 , wherein the plurality of optoelectronic devices comprises In x Ga 1-x N, 0<X<1.
15. A production lot of substrate structures comprising at least about 20 substrate structures, wherein each substrate structure includes:
a substrate having an upper surface;
a buffer layer comprising a Group III-V material adjacent the upper surface of the substrate, wherein the buffer layer has an average thickness within a range of between at least about 0.1 μm to not greater than about 0.8 μm; and
a plurality of optoelectronic devices disposed on the buffer layer and having a normalized lot light emission wavelength standard deviation of not greater than about 0.0641 nm/cm 2 at a wavelength of about 400 nm to about 550 nm.
16. The production lot of claim 15 , wherein the normalized light emission wavelength standard deviation (nσ) is lot light emission standard deviation normalized for an average lot substrate surface area, the production lot having an average lot diameter of the substrates of at least 2 inches (5.1 cm).
17. The production lot of claim 15 , wherein the production lot has an average lot buffer layer thickness within a range of between at least about 0.2 μm to no greater than about 0.7 μm.
18. The production lot of claim 15 , wherein the production lot has an average substrate surface area within a range of between at least about 20.2 cm 2 to no greater than about 730.6 cm 2 .
19. The production lot of claim 15 , wherein each substrate comprises gallium nitride.
20. The substrate of claim 1 , wherein the light emission wavelength standard deviation is not greater than about 0.0588 nm/cm 2 at the wavelength of about 400 nm to about 550 nm.