Self-aligned repairing process for barrier layer
A self-aligned repairing process for a barrier layer is provided. A repair layer is formed by chemical vapor deposition using an organometallic compound as a precursor gas. The precursor gas adsorbed on a dielectric layer exposed by defects in a barrier layer is transformed to an insulating metal oxide layer, and the precursor gas adsorbed on the barrier layer is transformed to a metal layer.
1. A method of forming barrier layer, comprising:
forming a damascene opening in a dielectric layer on a substrate, wherein a surface of the dielectric layer has free hydroxyl groups;
forming a barrier layer on the dielectric layer to cover inner surfaces of the damascene opening;
depositing a precursor layer on the barrier layer by chemical vapor deposition using an organometallic compound containing a central metal atom as a precursor gas, wherein the central metal atom is Al, Ru, Co, Mn, or Ta;
transforming the precursor layer to a repair layer, wherein the precursor layer on the dielectric layer exposed by defects in the barrier layer is transformed to an insulating metal oxide portion and the precursor layer on the barrier layer is transformed to a metal portion; and
conformally forming a seed layer on the repair layer.
2. The method of claim 1 , wherein the barrier layer is made from a metal containing Co, Ru, Ta, or any combinations thereof, or a conductive ceramics, which is tantalum nitride, indium oxide, copper silicide, tungsten nitride, or titanium nitride.
3. The method of claim 1 , wherein the organometallic compound is trimethylaluminum, or triethylaluminum.
4. The method of claim 1 , wherein the organometallic compound is tricarbonyl[(1,2,3,4-eta)-1,3,-cyclohexadiene]ruthenium, triruthenium dodecacarbonyl, bis(ethylcyclopentadienyl) ruthenium, bis(methylcyclopentadienyl) ruthenium, or tris(acetylacetonate) ruthenium.
5. The method of claim 1 , wherein the organometallic compound is cobalt dicarbonyl cyclopentadiene, or dicobalt hexacarbonyl tert-butylacetylene.
6. The method of claim 1 , wherein the organometallic compound is dimanganese decacarbonyl.
7. The method of claim 1 , wherein the organometallic compound is pentakis(dimethylamino) tantalum, (tert-butylimido) tris(ethylmethylamido) tantalum, tris(diethylamino) (tert-butylimido) tantalum, or (tert-amylimido) tris(dimethylamido) tantalum.
8. The method of claim 1 , wherein the chemical vapor deposition is plasma enhanced chemical vapor deposition, metalorganic chemical vapor deposition, or plasma enhanced atomic layer deposition.
9. The method of claim 1 , wherein forming the damascene opening is performed by photolithography or etching.
10. A method of forming a damascene structure, comprising:
forming a damascene opening in a dielectric layer on a substrate, wherein a surface of the dielectric layer has free hydroxyl groups;
forming a barrier layer on the dielectric layer to cover inner surfaces of the damascene opening;
depositing a repair layer on the barrier layer by chemical vapor deposition using an organometallic compound containing a central metal atom as a precursor gas, wherein the central metal atom is Al, Ru, Co, Mn, or Ta, and wherein the precursor gas adsorbed on the dielectric layer exposed by defects in the barrier layer is transformed to an insulating metal oxide portion, and the precursor gas adsorbed on the barrier layer is transformed to a metal portion;
forming a seed layer on the repair layer;
forming a metal layer on the seed layer to fill in the damascene opening; and
removing an upper portion of the metal layer, the seed layer, the repair layer, the barrier layer, and the dielectric layer to form a metal interconnect in the damascene opening.
11. The method of claim 10 , wherein the barrier layer is made from a metal containing Co, Ru, Ta, or a combination thereof, or a conductive ceramics, which is tantalum nitride, indium oxide, copper silicide, tungsten nitride, or titanium nitride.
12. The method of claim 10 , wherein the organometallic compound is Al(CH)3 or Al(C2H5)3.
13. The method of claim 10 , wherein the organometallic compound is(tricarbonyl[(1,2,3,4-eta)-1,3,-cyclohexadiene]ruthenium), triruthenium dodecacarbonyl, bis(ethylcyclopentadienyl) ruthenium, bis(methylcyclopentadienyl) ruthenium, or tris(acetylacetonate)ruthenium.
14. The method of claim 10 , wherein the organometallic compound is cobalt dicarbonyl cyclopentadiene, or dicobalt hexacarbonyl tert-butylacetylene.
15. The method of claim 10 , wherein the organometallic compound is Mn2(CO)10.
16. The method of claim 10 , wherein the organometallic compound is pentakis(dimethylamino) tantalum, (tert-butylimido) tris(ethylmethylamido) tantalum, tris(diethylamino) (tert-butylimido) tantalum, or (tert-amylimido) tris(dimethylamido) tantalum.
17. The method of claim 10 , wherein the chemical vapor deposition is plasma enhanced chemical vapor deposition, metalorganic chemical vapor deposition, or plasma enhanced atomic layer deposition.
18. The method of claim 10 , wherein the seed layer is made from Cu, Co, Al, Ag, or any combinations thereof.
19. The method of claim 10 , wherein the metal layer made from copper.
20. The method of claim 10 , wherein forming the seed layer is performed by sputtering or evaporation.