Device for detecting evaporation source and method for applying the same
The present disclosure relates to a process for manufacturing Organic Light-Emitting Diode (OLED) display panel, and in particular to a device and a method for detecting evaporation source. Through installing a mobile detector above a linear evaporation source, the vapor-deposition rate of the whole linear can be timely and effectively detected. The feedback of uniformity of vapor-deposition can be effectively given, and at the same time the abnormity of the vapor-deposition can be found. Meanwhile, in order to increase the yield and quality of product as well as prevent the evaporation source pollution caused by the dropping of some defects such as organic material or dust, the mobile detector is locked in one side of the evaporation source when it does not work.
1. A device for detecting evaporation source, comprising:
a guide rail device installed on a vapor-deposition equipment, the vapor-deposition equipment having a linear evaporation source; and
a detector movably installed at a preconfigured distance from the linear evaporation source via the guide rail device, for entirely detecting vapor-deposition rate of the evaporation source;
wherein, the detector moves along longitudinal direction of the linear evaporation source by the guide rail device;
wherein, the guide rail device comprises a standby guide rail, a detecting guide rail, and a deflector:
the detector reciprocates along the longitudinal direction of the linear evaporation source for entirely detecting the linear evaporation source by the detecting guide rail;
through the standby guide rail, the detector stops at a side close to the linear evaporation source:
the detector is switched between the standby guide rail and the detecting guide rail, meanwhile, during the switch between the standby guide rail and the detecting guide rail, the moving direction of the detector is the vertical direction of the linear evaporation source by the deflector.
2. The device as disclosed in claim 1 further comprising a connecting structure,
wherein one end of the connecting structure is connected with the detector; and the other end is movably connected with the guide rail device.
3. The device as disclosed in claim 2 further comprising a power device for driving the connecting structure driving the detector to move along a locus of the guide rail device.
4. The device as disclosed in claim 1 , wherein, the movement of the detector along the longitudinal direction of the linear evaporation source via the detecting guide rail is reciprocation.
5. A method for applying a device for detecting evaporation source, which is applied to a vapor-deposition equipment, comprising:
(a) positioning a detector at a side closed to a linear evaporation source;
(b) moving the detector to a position above the linear evaporation source by a guide rail device; and
(c) movably detecting the linear evaporation source along a locus the same shape as the linear evaporation source by the detector;
wherein, the guide rail device comprises a standby guide rail, a detecting guide rail, and a deflector;
the detector reciprocates along the longitudinal direction of the linear evaporation source for entirely detecting the linear evaporation source by the detecting guide rail;
through the standby guide rail, the detector stops at a side close to the linear evaporation source;
the detector is switched between the standby guide rail and the detecting guide rail, meanwhile, during the switch between the standby guide rail and the detecting guide rail, the moving direction of the detector is the vertical direction of the linear evaporation source by the deflector.
6. The method as disclosed in claim 5 , wherein, the guide rail device is installed on the vapor-deposition equipment; the detector is movably installed at a preconfigured distance from the linear evaporation source via the guide rail device, for entirely detecting vapor-deposition rate of the evaporation source; the detector moves along longitudinal direction of the linear evaporation source by the guide rail device.
7. The method as disclosed in claim 6 , wherein, the device further comprises a connecting structure, one end of the connecting structure is connected with the detector, and the other end is movably connected with the guide rail device.
8. The method as disclosed in claim 7 , wherein, the device further comprises a power device for driving the connecting structure driving the detector to move along a locus of the guide rail device.
9. The method as disclosed in claim 6 , wherein, the vapor-deposition is carried out in a vacuum chamber.
10. The method as disclosed in claim 6 , wherein the detector moves at a uniform motion.
11. The method as disclosed in claim 6 , wherein, the detector is CTRS crystal resonator.