Magnetoresistive element using specific underlayer material
View Patent ↗According to one embodiment, a magnetoresistive element includes a recording layer having magnetic anisotropy perpendicular to a film surface and having a variable magnetization direction, a reference layer having magnetic anisotropy perpendicular to a film surface and having an invariable magnetization direction, an intermediate layer provided between the recording layer and the reference layer, and a underlayer containing AlTiN and provided on an opposite side of a surface of the recording layer on which the intermediate layer is provided.
1. A magnetoresistive element comprising:
a recording layer having magnetic anisotropy perpendicular to a film surface and having a variable magnetization direction;
a reference layer having magnetic anisotropy perpendicular to a film surface and having an invariable magnetization direction;
an intermediate layer provided between the recording layer and the reference layer; and
an underlayer containing AlTiN and provided on an opposite side of a surface of the recording layer on which the intermediate layer is provided, wherein the underlayer comprises an amorphous structure, and contains one element selected from the group consisting of O, B and C.
2. The element according to claim 1 , wherein
the recording layer contains FeB, Fe, or CoFe or CoFeB in which a concentration of Fe is higher than that of Co.
3. The element according to claim 1 , wherein
the recording layer includes a nonmagnetic layer containing one element selected from the group consisting of Nb, Hf, W, Zr, Ti, Al, Si, Ta, Y, and La, or contains one element selected from the group consisting of Nb, Hf, W, Zr, Ti, Al, Si, Ta, Y, and La.
4. The element according to claim 1 , wherein
the recording layer includes
a first magnetic layer provided on the underlayer side and containing FeB, CoB, or CoFeB in which a concentration of Co is higher than that of Fe, and
a second magnetic layer provided on the intermediate layer side and containing FeB or CoFeB in which a concentration of Fe is higher than that of Co.
5. The element according to claim 1 , further comprising
a lower electrode provided on an opposite side of a surface of the underlayer on which the recording layer is provided, being in direct contact with the opposite side, and containing one element selected from the group consisting of Mg, Al, Si, Ti, V, Cr, Zr, Nb, Hf, Ta, W, Ge, and Ga.
6. The element according to claim 5 , wherein
the lower electrode contains one element selected from the group consisting of O, N, B, and C.
7. The element according to claim 1 , wherein a ratio between AlTi and N of AlTiN of the underlayer is 1:1.
8. The element according to claim 1 , wherein if the underlayer is made of Al (100-X) Ti X N, 10≦X≦50.
9. A magnetoresistive element comprising:
a recording layer having magnetic anisotropy perpendicular to a film surface and having a variable magnetization direction, wherein the recording layer contains FeB, Fe, or CoFe or CoFeB;
a reference layer having magnetic anisotropy perpendicular to a film surface and having an invariable magnetization direction;
an intermediate layer provided between the recording layer and the reference layer;
an underlayer made of TiN and provided on an opposite side of a surface of the recording layer on which the intermediate layer is provided, wherein the underlayer contains one element selected from the group consisting of O and C; and
a lower electrode provided on an opposite side of a surface of the underlayer on which the recording layer is provided, being in direct contact with the opposite side, and containing one element selected from the group consisting of Al, Si, Ti, V, Cr, Zr, Nb, Hf, Ta, W, Ge, Ga, B, and Mg.
10. The element according to claim 9 , wherein
a concentration of Fe in the CoFe or CoFeB is higher than that of Co in the CoFe or CoFeB.
11. The element according to claim 9 , wherein
the recording layer includes a nonmagnetic layer containing one element selected from the group consisting of Nb, Hf, W, Zr, Ti, Al, Si, Ta, Y, and La, or contains one element selected from the group consisting of Nb, Hf, W, Zr, Ti, Al, Si, Ta, Y, and La.
12. The element according to claim 9 , wherein
the recording layer includes
a first magnetic layer provided on the underlayer side and containing FeB, CoB, or CoFeB in which a concentration of Co is higher than that of Fe, and
a second magnetic layer provided on the intermediate layer side and containing FeB or CoFeB in which a concentration of Fe is higher than that of Co.
13. The element according to claim 9 , wherein
the lower electrode contains one element selected from the group consisting of O, N, B, and C.
14. The element according to claim 9 , wherein
the underlayer is in direct contact with the lower electrode.
15. The element according to claim 9 , wherein
the underlayer comprises an amorphous structure.
16. A magnetoresistive element comprising:
a recording layer having magnetic anisotropy perpendicular to a film surface and having a variable magnetization direction;
a reference layer having magnetic anisotropy perpendicular to a film surface and having an invariable magnetization direction;
an intermediate layer provided between the recording layer and the reference layer; and
an underlayer made of a boride containing one element selected from the group consisting of Al, Si, Ti, V, Cr, Zr, Nb, Hf, Ta, W, Ge, and Ga and provided on an opposite side of a surface of the recording layer on which the intermediate layer is provided, wherein the underlayer contains one element selected from the group consisting of O and C.
17. The element according to claim 16 , wherein
the recording layer contains FeB, Fe, or CoFe or CoFeB in which a concentration of Fe is higher than that of Co.
18. The element according to claim 16 , wherein
the recording layer includes a nonmagnetic layer containing one element selected from the group consisting of Nb, Hf, W, Zr, Ti, Al, Si, Ta, Y, and La, or contains one element selected from the group consisting of Nb, Hf, W, Zr, Ti, Al, Si, Ta, Y, and La.
19. The element according to claim 16 , wherein
the recording layer includes
a first magnetic layer provided on the underlayer side and containing FeB, CoB, or CoFeB in which a concentration of Co is higher than that of Fe, and
a second magnetic layer provided on the intermediate layer side and containing FeB or CoFeB in which a concentration of Fe is higher than that of Co.
20. The element according to claim 16 , wherein
the underlayer comprises an amorphous structure.