Method and apparatus for curing thin films on low-temperature substrates at high speeds
View Patent ↗A curing apparatus for thermally processing thin films on low-temperature substrates at high speeds is disclosed. The curing apparatus includes a strobe head, a strobe control module and a conveyor control module. The strobe control module controls the power, duration and repetition rate of a set of pulses generated by a flash lamp on the strobe head. The conveyor control module along with the strobe control module provide real-time synchronization between the repetition rate of the set of pulses and the speed at which the substrate is being moved under the strobe head, according to the speed information.
1. A curing apparatus comprising:
a strobe head having a flash lamp;
a strobe control module for controlling power, duration and repetition rate of a plurality of pulses generated by said flash lamp; and
a conveyor control module, in conjunction with said strobe control module, for synchronizing in real-time said repetition rate of said plurality of pulses with a speed at which said substrate is being moved under said strobe head, wherein said synchronization of a strobe pulse rate f is given by:
f
=
0.2
*
S
*
O
W
where f=strobe pulse rate [Hz]
S=speed at which said substrate is being moved [ft/min]
O=an average number of strobe pulses received by said substrate
W=strobe head width [in].
2. The curing apparatus of claim 1 , wherein said flash lamp is a xenon flash lamp.
3. The curing apparatus of claim 2 , wherein said xenon flash lamp is capable of generating pulses from 10 μs to 10 ms at a pulse repetition rate of up to 1 kHz.
4. The curing apparatus of claim 2 , wherein the spectral content of said xenon flash lamp ranges from 200 nm to 2,500 nm.
5. The curing apparatus of claim 1 , wherein said curing apparatus further includes an air knife for cooling said substrate.
6. The curing apparatus of claim 1 , wherein said curing apparatus further includes a roller for removing heat from said substrate via conduction.
7. The curing apparatus of claim 1 , wherein said flash lamp is a Directed Plasma Arc lamp.
8. The curing apparatus of claim 1 , wherein said curing apparatus further includes a conveyor system for transporting said substrate under said strobe head.
9. The curing apparatus of claim 8 , wherein said curing apparatus further includes a feeder for feeding said substrate to said conveyor system.
10. The curing apparatus of claim 1 , wherein said curing apparatus further includes a sensor for sensing the speed at which a substrate is being moved under said strobe head.
11. A method for curing thin films on low-temperature substrates, said method comprising:
generating a plurality of pulses via a flash lamp at a predetermined power, duration and repetition rate; and
transporting a layer of substrate under said flash lamp such that a film located on said layer of substrate is cured by said plurality of pulses from said flash lamp, wherein said layer of substrate is moved at a speed that is synchronized with said repetition rate of said plurality of pulses, and said film is subjected to multiple exposures from said plurality of pulses, wherein said synchronization of a strobe pulse rate f is given by:
f
=
0.2
*
S
*
O
W
where f=strobe pulse rate [Hz]
S=speed at which said substrate is being moved [ft/min]
O=an average number of strobe pulses received by said substrate
W=strobe head width [in].
12. The method of claim 11 , wherein said layer of substrate is conveyed by a reel-to-reel system.
13. The method of claim 11 , wherein said method further includes inserting a thermal barrier layer between said film and said layer of substrate.