Method of manufacturing resin-encapsulated semiconductor device, and lead frame
View Patent ↗A method of manufacturing a resin-encapsulated semiconductor device capable of supporting finer pitches comprises forming a metal plating layer on an inner lead and an outer lead of a lead. A semiconductor chip is mounted on a die pad, and an electrode on a surface of the semiconductor chip is electrically connected to the inner lead via a thin metal wire. The semiconductor chip, the thin metal wire and the inner lead are encapsulated by an encapsulation resin so that the outer lead extends beyond the encapsulation resin and is exposed. Resin burrs formed during resin encapsulation are removed by a defocused laser, and any metal adhered on the lead is lifted off.
1. A method of manufacturing a resin-encapsulated semiconductor device, comprising:
preparing a lead frame comprising a plurality of leads and a die pad, the plurality of leads each comprising an inner lead and an outer lead;
forming a metal plating layer on a surface of the die pad and surfaces of the inner lead and the outer lead of each of the plurality of leads;
mounting a semiconductor chip on the die pad having the metal plating layer formed thereon;
connecting the semiconductor chip and the inner lead via a thin metal wire;
exposing the outer lead by resin-encapsulating the semiconductor chip mounted on the die pad, the thin metal wire, and the inner lead with an encapsulation resin;
removing a resin burr formed between adjacent ones of the outer leads by laser irradiation;
removing the metal plating layer exposed from the encapsulation resin; and
forming a solder plating layer on the outer lead from which the metal plating layer is removed.
2. A method of manufacturing a resin-encapsulated semiconductor device according to claim 1 , wherein the removing of the resin burr comprises defocusing a laser from each of the plurality of leads.
3. A method of manufacturing a resin-encapsulated semiconductor device according to claim 1 , further comprising performing light etching in the removing of the metal plating layer.
4. A method of manufacturing a resin-encapsulated semiconductor device according to claim 1 , wherein the forming of the metal plating layer on the surfaces of the inner lead and the outer lead comprises coating only a top surface of each of the plurality of leads with the metal plating layer.
5. A method of manufacturing a resin-encapsulated semiconductor device according to claim 1 , wherein the forming of the metal plating layer on the surfaces of the inner lead and the outer lead comprises coating a top surface and a side surface of each of the plurality of leads with the metal plating layer.
6. A method of manufacturing a resin-encapsulated semiconductor device according to claim 1 , wherein the forming of the metal plating layer on the surfaces of the inner lead and the outer lead comprises coating a top surface, a side surface, and a bottom surface of each of the plurality of leads with the metal plating layer.
7. A method of manufacturing a resin-encapsulated semiconductor device according to claim 1 , wherein the forming of the metal plating layer on the surfaces of the inner lead and the outer lead comprises forming metal plating layers on the surface of the inner lead and the surface of the outer lead so that the metal plating layers are spaced apart from each other.