Heat treatment apparatus emitting flash of light
Flash lamps connected to short-pulse circuits and flash lamps connected to long-pulse circuits are alternately arranged in a line. The duration of light emission from the flash lamps connected to the long-pulse circuits is longer than the duration of light emission from the flash lamps connected to the short-pulse circuits. A superimposing of a flash of light with a high peak intensity from the flash lamps that emit light for a short time and a flash of light with a gentle peak from the flash lamps that emit light for a long time can increase the temperature of even a deep portion of a substrate to an activation temperature or more without heating a shallow portion near the substrate surface more than necessary. This achieves the activation of deep junctions without causing substrate warpage or cracking.
1. A heat treatment method irradiating a substrate with flashes of light from flash lamps to heat the substrate, comprising:
(a) a first irradiation step of irradiating said substrate with a flash of light of a first pulse, said first irradiation step being started at a first time;
(b) a second irradiation step of irradiating said substrate with a flash of light of a second pulse having a length different from said first pulse, said second irradiation step being started at a second time later than said first time; and
(c) Performing said second irradiation step such that at least a part of the irradiation of a flash of light of said second irradiation step is superimposed on the irradiation of a flash of light of said first irradiation step.
2. The heat treatment method according to claim 1 ,
wherein
said second pulse is longer than said first pulse.