IP Library Granted Patent US 9,368,723
Granted Patent B2
US 9,368,723 · App. 14/177,828 · Granted Jun 14, 2016

Dose-controlled, floating evaporative assembly of aligned carbon nanotubes for use in high performance field effect transistors

Inventors: Michael Scott Arnold (Middleton, WI); Padma Gopalan (Madison, WI); Gerald Joseph Brady (Madison, WI); Yongho Joo (Madison, WI)
H01L51/0003C01B31/0246H01L51/0048H01L51/0512H01L51/0558
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Quick Facts
Patent No.
US 9,368,723
App. No.
14/177,828
Granted
Jun 14, 2016
Kind
B2
Abstract

High density films of semiconducting single-walled carbon nanotubes having a high degree of nanotube alignment are provided. Also provided are methods of making the films and field effect transistors (FETs) that incorporate the films as conducting channel materials. The single-walled carbon nanotubes are deposited from a thin layer of organic solvent containing solubilized single-walled carbon nanotubes that is spread over the surface of an aqueous medium, inducing evaporative self-assembly upon contacting a solid substrate.

Claims (18)

1. A method of forming a film of aligned s-SWCNTs on a substrate, the method comprising:

(a) partially submerging a hydrophobic substrate in an aqueous medium;

(b) applying a dose of a liquid solution to the aqueous medium, the liquid solution comprising semiconductor-selective-polymer-wrapped s-SWCNTs dispersed in an organic solvent, whereby the liquid solution spreads into a layer on the aqueous medium at an air-liquid interface and semiconductor-selective-polymer-wrapped s-SWCNTs from the layer are deposited as a stripe of aligned semiconductor-selective-polymer-wrapped s-SWCNTs on the hydrophobic substrate; and

(c) at least partially withdrawing the hydrophobic substrate, upon which the stripe of aligned semiconductor-selective-polymer-wrapped s-SWCNTs has been deposited, from the aqueous medium.

2. The method of claim 1 , further comprising repeating steps (b) and (c) in sequence one or more times to deposit one or more additional stripes of aligned semiconductor-selective-polymer-wrapped s-SWCNTs on the hydrophobic substrate.

3. The method of claim 1 , further comprising removing the semiconductor-selective polymer from the aligned semiconductor-selective-polymer-wrapped s-SWCNTs.

4. The method of claim 1 , wherein the semiconductor-selective-polymer-wrapped s-SWCNTs in the stripe have a degree of alignment of about ±15° or better.

5. The method of claim 1 , wherein the single-walled carbon nanotube linear packing density in the stripe is at least 40 single-walled carbon nanotubes/μm.

6. The method of claim 2 , wherein the substrate is withdrawn at a rate of at least one mm/min.

7. The method of claim 6 , wherein stripes are deposited on the substrate with a periodicity of 200μm or smaller.

8. The method of claim 1 , wherein the semiconductor-selective polymer is a polyfluorene derivative.

9. The method of claim 1 , wherein the film has a s-SWCNT purity level of at least 99%.

10. The method of claim 1 , wherein the semiconductor-selective -polymer-wrapped s-SWCNTs in the stripe have a degree of alignment of about ±17° or better.

11. The method of claim 1 , wherein the single-walled carbon nanotube linear packing density in the stripe is at least 30 single-walled carbon nanotubes/μm.

12. The method of claim 2 , wherein the substrate is withdrawn at a rate of at least five mm/min.

13. The method of claim 1 , wherein the organic solvent comprises chloroform, dichloromethane, N,N-dimethylformamide, benzene, dichlorobenzene, toluene or xylene.

14. The method of claim 1 , wherein the hydrophobic substrate comprises SiO 2 coated with a hydrophobic polymer.

15. The method of claim 1 , wherein the organic solvent is chloroform.

Assignments (2)
CONFIRMATORY LICENSE Recorded Jul 1, 2014
From: WISCONSIN ALUMNI RESEARCH FOUNDATION
To: NATIONAL SCIENCE FOUNDATION
Reel/Frame 033260/0651 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 2, 2014
From: ARNOLD, MICHAEL; GOPALAN, PADMA; BRADY, GERALD; JOO, YONGHO
To: WISCONSIN ALUMNI RESEARCH FOUNDATION
Reel/Frame 032811/0265 →
Continuity (1)
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