Semiconductor device including an extended impurity region
In one embodiment, the semiconductor device includes at least one active fin protruding from a substrate, a first gate electrode crossing the active fin, and a first impurity region formed on the active fin at a first side of the first gate electrode. At least a portion of the first impurity region is formed in a first epitaxial layer portion on the active fin. A second impurity region is formed on the active fin at a second side of the first gate electrode. The second impurity region has at least a portion not formed in an epitaxial layer.
1. A semiconductor device, comprising:
at least one active fin protruding from a substrate;
a first gate electrode crossing the active fin;
a first impurity region formed on the active fin at a first side of the first gate electrode, at least a portion of the first impurity region being formed in a first epitaxial layer portion on the active fin; and
a second impurity region formed on the active fin at a second side of the first gate electrode, the second impurity region having a greater width in the longitudinal direction of the active fin than the first impurity region, the second impurity region including a first portion and a second portion, the first portion being formed in a second epitaxial layer portion, and the second portion not being formed in an epitaxial layer,
wherein the upper surfaces of the first portion and the second portion are substantially coplanar.
2. The semiconductor device of claim 1 , wherein the second impurity region has a top surface at a same height as a top surface of a portion of the active fin crossed by the gate electrode.
3. The semiconductor device of claim 1 , further comprising:
a first contact electrically connected to the first impurity region; and
a second contact electrically connected to a distal end of the second impurity region with respect to the first gate electrode.
4. The semiconductor device of claim 1 , wherein a top surface of the first impurity region is higher than the top surface of the portion of the active fin crossed by the gate electrode.
5. The semiconductor device of claim 1 , further comprising:
a second gate electrode crossing the active fin;
a third impurity region formed on the active fin at a first side of the second gate electrode; and wherein
the first impurity region is formed on the active fin at a second side of the second gate electrode.
6. The semiconductor device of claim 1 , further comprising:
a second gate electrode crossing the active fin;
a third impurity region formed on the active fin at a first side of the second gate electrode and the second side of the first gate electrode; and wherein
the second impurity region is formed on the active fin at a second side of the second gate electrode.
7. The semiconductor device of claim 6 , further comprising:
a conductor electrically connecting the second and third impurity regions.
8. The semiconductor device of claim 1 , wherein the first portion is at a distal end of the second impurity region with respect to the first gate electrode.
9. The semiconductor device of claim 8 , further comprising:
a first contact electrically connected to the first impurity region; and
a second contact electrically connected to the first portion of the second impurity region.
10. The semiconductor device of claim 8 , wherein a top surface of the first portion is higher than the top surface of the active fin crossed by the first gate electrode.
11. The semiconductor device of claim 10 , wherein a top surface of the first impurity region is higher than the top surface of the active fin crossed by the first gate electrode.
12. The semiconductor device of claim 8 , wherein the top surface of the first impurity region and the top surface of the first portion are a same height.
13. The semiconductor device of claim 8 , wherein the second impurity region includes a third portion, the third portion is at a proximate end of the second impurity region with respect to the first gate electrode, and the third portion is formed in a third epitaxial layer portion on the active fin.
14. The semiconductor device of claim 13 , wherein a top surface of the first portion and a top surface of the third portion are a same height.
15. The semiconductor device of claim 13 , wherein a top surface of the first portion is higher than the top surface of the active fin crossed by the first gate electrode, and a top surface of the third portion is higher than the top surface of the active fin crossed by the first gate electrode.
16. The semiconductor device of claim 8 , further comprising:
an etch stop layer formed over the second portion.
17. The semiconductor device of claim 8 , wherein a top surface of the first portion is a same height as a top surface of the active fin crossed by the first gate electrode.
18. The semiconductor device of claim 8 , further comprising:
a second gate electrode crossing the active fin;
a third impurity region formed on the active fin at a first side of the second gate electrode; and wherein
the first impurity region is formed on the active fin at a second side of the second gate electrode.
19. The semiconductor device of claim 8 , further comprising:
a second gate electrode crossing the active fin;
a third impurity region formed on the active fin at a first side of the second gate electrode and the second side of the first gate electrode; and wherein
the second impurity region is formed on the active fin at a second side of the second gate electrode.
20. The semiconductor device of claim 19 , further comprising:
a conductor electrically connecting the second and third impurity regions.
21. The semiconductor device of claim 1 , wherein the first portion is at a proximate end of the second impurity region with respect to the first gate electrode.
22. The semiconductor device of claim 21 , wherein a top surface of the first portion is higher than a top surface of the active fin crossed by the first gate electrode.
23. The semiconductor device of claim 22 , wherein the top surface of the first portion and a top surface of the first impurity region have a same height.