Gate structures with various widths and method for forming the same
Embodiments of a semiconductor device structure and a method for forming the same are provided. The semiconductor device structure includes a substrate and a first metal gate structure formed over the substrate. The first metal gate structure has a first width. The semiconductor device structure further includes a first contact formed adjacent to the first metal gate structure and a second metal gate structure formed over the substrate. The second metal gate structure has a second width smaller than the first width. The semiconductor device structure further includes an insulating layer formed over the second metal gate structure and a second contact self-aligned to the second metal gate structure.
1. A semiconductor device structure, comprising:
a substrate;
a first metal gate structure formed over the substrate, wherein the first metal gate structure has a first width, and the first metal gate structure includes a first metal gate electrode;
a first contact formed adjacent to the first metal gate structure;
a second metal gate structure formed over the substrate, wherein the second metal gate structure has a second width smaller than the first width, and the second metal gate structure includes a second metal gate electrode;
an insulating layer formed over the second metal gate structure, wherein a top of the insulating layer is substantially aligned with a top of the first metal gate electrode; and
a second contact self-aligned to the second metal gate structure, wherein a first height of the first metal gate structure is substantially equal to a sum of a second height of the second metal gate structure and a third height of the insulating layer.
2. The semiconductor device structure as claimed in claim 1 , wherein a ratio of the first width to the second width is in a range from about 2 to 15.
3. The semiconductor device structure as claimed in claim 1 , wherein the first metal gate structure has a first height, and the second metal gate structure has a second height smaller than the first height.
4. The semiconductor device structure as claimed in claim 3 , wherein a ratio of the first height to the second height is in a range from about 4 to about 10.
5. The semiconductor device structure as claimed in claim 3 , wherein the insulating layer formed over the second metal gate structure has a third height, and a sum of the second height and the third height is substantially equal to the first height, wherein the first height is measured from the top of the first metal gate electrode to a bottom of the first metal gate structure, and the second height is measured from the top of the second metal gate electrode to a bottom of the second metal gate structure.
6. The semiconductor device structure as claimed in claim 1 , wherein the insulating layer is formed on the second metal gate structure but not on the first metal gate structure, and a dielectric layer is formed above and in direct contact with the top of the insulating layer and the top of the first metal gate electrode.
7. The semiconductor device structure as claimed in claim 1 , wherein a portion of the second contact is formed on the insulating layer.
8. A semiconductor device structure, comprising:
a substrate;
a first metal gate structure formed over the substrate, wherein the first metal gate structure includes a first metal gate electrode;
a first contact formed adjacent to the first metal gate structure;
a second metal gate structure formed over the substrate, wherein the second metal gate structure includes a second metal gate electrode;
an insulating layer formed over the second metal gate structure; and
a second contact self-aligned to the second metal gate structure, wherein the second contact has an extending portion extending into the insulating layer, and a bottom surface of the extending portion of the second contact is lower than a top surface of the first metal gate electrode,
wherein the first metal gate structure has a first width, and the second metal gate structure has a second width smaller than the first width.
9. The semiconductor device structure as claimed in claim 8 , wherein the first metal gate structure has a first height, the second metal gate structure has a second height, and a ratio of the first height to the second height is in a range from about 4 to about 10.
10. The semiconductor device structure as claimed in claim 8 , wherein the first metal gate structure has a first height, the second metal gate structure has a second height, and the insulating layer formed over the second metal gate structure has a third height, and a sum of the second height and the third height is substantially equal to the first height.
11. The semiconductor device structure as claimed in claim 8 , wherein the insulating layer is formed on the second metal gate structure but not on the first metal gate structure, and a dielectric layer is formed above and in direct contact with the top of the insulating layer and the top of the first gate electrode.
12. The semiconductor device structure as claimed in claim 8 , wherein a portion of the second contact is formed on the insulating layer.
13. A semiconductor device structure, comprising:
a substrate;
a first gate structure formed over the substrate, wherein the first gate structure has a first width, and the first gate structure includes a first metal gate electrode;
a second gate structure formed over the substrate, wherein the second gate structure has a second width smaller than the first width, and the second gate structure includes a second metal gate electrode;
an insulating layer formed over the second gate structure, wherein a top of the insulating layer is substantially aligned with a top of the first metal gate electrode; and
a contact aligned to the second gate structure but not in direct contact with the second gate structure, wherein the contact has an extending portion extending into the insulating layer, and a bottom surface of the extending portion of the contact is lower than a top surface of the first metal gate electrode, and
wherein a first height of the first metal gate structure is substantially equal to a sum of a second height of the second metal gate structure and a third height of the insulating layer.
14. The semiconductor device structure as claimed in claim 13 , wherein the first gate structure has a first height, and the second gate structure has a second height smaller than the first height.
15. The semiconductor device structure as claimed in claim 13 , wherein a sum of a height of the insulating layer and a height of the second gate structure is substantially equal to a height of the first gate structure, wherein the first height is measured from the top of the first metal gate electrode to a bottom of the first gate structure, and the second height is measured from the top of the second metal gate electrode to a bottom of the second gate structure.
16. The semiconductor device structure as claimed in claim 13 , wherein the first gate structure and the second gate structure are formed across a fin structure over the substrate.
17. The semiconductor device structure as claimed in claim 13 , further comprising:
a dielectric layer formed above and in direct contact with the top of the insulating layer and the top of the first metal gate electrode.
18. The semiconductor device structure as claimed in claim 17 , wherein the contact is formed through the dielectric layer.
19. The semiconductor device structure as claimed in claim 13 , wherein a portion of the contact is formed on the insulating layer.
20. The semiconductor device structure as claimed in claim 13 , wherein the contact is formed on a source/drain region in the substrate adjacent to the second gate structure.