IP Library › Patent Application 14180849
Patent Application
App. No. 14/180,849

LASER ABLATION CELL AND TORCH SYSTEM FOR A COMPOSITIONAL ANALYSIS SYSTEM

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Quick Facts
Patent No.
US None
App. No.
14/180,849
Abstract

A laser ablation system includes a sample chamber 102 configured to accommodate a target 104 within an interior 106 thereof, a sample generator 108 configured to remove a portion of the target 104 (which may be subsequently captured as a sample) and an analysis system 110 configured to analyze a composition of the sample. A sample capture cell in the chamber proximate to the target has a capture cavity configured to receive target material, a first inlet configured to transmit a flow of a carrier gas from a first location adjacent to an exterior of the capture cell into a region of the capture cavity; and an outlet configured to receive carrier gas from another region of the capture cavity. The sample chamber 102 includes an injection nozzle 120 configured to introduce, into the interior 106, a fluid such as a carrier gas.

Claims (69)

1 . An apparatus for handling target material removed from a laser ablation site of a target, the apparatus comprising:

a sample capture cell configured to be arranged operably proximate to the target, the sample capture cell including:

a capture cavity having an opening formed in a surface of the capture cell, wherein the capture cavity is configured to receive, through the opening, target material ejected or generated from the laser ablation site when the sample capture cell is operably proximate to the target;

a first inlet in fluid communication with the capture cavity, wherein the first inlet is configured to transmit a flow of a carrier gas from a first location adjacent to an exterior of the capture cell into a region of the capture cavity; and

an outlet in fluid communication with the capture cavity and configured to receive carrier gas from another region of the capture cavity.

2 . The apparatus of claim 1 including:

a guide wall exposed within the capture cavity and configured to direct a flow of the carrier gas within the capture cavity between the first inlet and the outlet such that at least a portion of the target material received within the capture cavity are transferrable into the outlet as a sample.

3 . The apparatus of claim 2 , wherein the guide wall is configured to direct the flow of the carrier gas across a surface of the target from the first inlet, through the capture cavity and into the outlet.

4 . The apparatus of claim 2 , wherein the sample capture cell is configured to guide a flow of the carrier gas located outside the capture cavity away from a surface of the target when the sample collector is operably proximate to the target.

5 . The apparatus of claim 2 , wherein at least one of the first inlet, the outlet, the guide wall and the second port is configured such that at least substantially all target material receivable within the capture cavity is transferable into the outlet.

6 . The apparatus of claim 2 , wherein the sample capture cell comprises a body, and wherein the at least two selected from the group consisting of the capture cavity, the first inlet, the outlet, the guide wall and the port are the second inlet, are integrally formed within the body.

7 . The apparatus of claim 1 , wherein the sample capture cell is operably proximate to the target when the surface is spaced apart from the target by a gap distance that is less than 1 mm.

8 . The apparatus of claim 1 , wherein a volume of the capture cavity is less than 1 cm 3 .

9 . The apparatus of claim 1 , wherein the first inlet is configured to transmit the flow of the carrier gas into the first region of the capture cavity along a first direction.

10 . The apparatus of claim 1 , wherein the first inlet is configured to transmit the flow of the carrier gas into the first region of the capture cavity along a first direction, and the first direction is at least substantially parallel to the surface of the target.

11 . The apparatus of claim 1 , wherein the sample capture cell further includes a second inlet in fluid communication with the capture cavity, wherein the second inlet is configured to transmit an external flow of a carrier gas from a second location adjacent to the exterior of the capture cell into a yet another region of the capture cavity.

12 . The apparatus of claim 11 , wherein the second inlet and the capture cavity are configured such that light is transmittable onto a region of the target when the sample capture cell is operably proximate to the target.

13 . The apparatus of claim 12 , wherein the second inlet and the capture cavity are configured such that laser light is transmittable onto a region of the target when the sample capture cell is operably proximate to the target.

14 . The apparatus of claim 13 , wherein the region of the target corresponds to the laser ablation site.

15 . The apparatus of claim 1 , further comprising a sample chamber, the sample chamber including an interior configured to accommodate the target.

16 . The apparatus of claim 15 , wherein the sample capture cell is configured to be arranged within the interior of the sample chamber at the location operably proximate to the target.

17 . The apparatus of claim 15 , further comprising a cell support coupled to the sample capture cell and configured to support the sample capture cell within the interior of the sample chamber.

18 . The apparatus of claim 17 , wherein the cell support is configured to be coupled to a sidewall of the sample chamber.

19 . The apparatus of claim 1 , further comprising a primary injection nozzle configured to generate, from a location outside the capture cavity, a flow of the carrier gas.

20 . The apparatus of claim 19 , wherein the primary injection nozzle is configured to generate the flow of the carrier gas from a location within the interior of the sample chamber.

21 . The apparatus of claim 1 , further comprising one or more auxiliary inlets configured to introduce an auxiliary fluid directly into the capture cavity.

22 . The apparatus of claim 21 , wherein an auxiliary inlet is configured to introduce the auxiliary fluid into the capture cavity at a location closer to the first inlet than the outlet.

23 . The apparatus of claim 21 , wherein an auxiliary inlet is configured to generate a flow of the auxiliary fluid extending in a direction that is at least substantially parallel to the surface of the target when the sample capture cell is operably proximate to the target.

24 . The apparatus of claim 21 , wherein an auxiliary inlet is configured to generate a flow of the auxiliary fluid extending in a direction that is at least substantially perpendicular to the surface of the target when the sample capture cell is operably proximate to the target.

25 . The apparatus of claim 21 , wherein an auxiliary inlet is configured to generate a flow of the auxiliary fluid extending in a direction that is oblique with respect to the surface of the target when the sample capture cell is operably proximate to the target.

26 . The apparatus of claim 21 , wherein an auxiliary inlet is configured to generate a flow of the auxiliary fluid extending toward the outlet.

27 . The apparatus of claim 21 , wherein an auxiliary inlet is configured to generate a flow of the auxiliary fluid extending toward the first inlet.

28 . The apparatus of claim 21 , wherein an auxiliary inlet is configured to generate a flow of the auxiliary fluid extending toward the target when the sample capture cell is operably proximate to the target.

29 . The apparatus of claim 21 , wherein an auxiliary inlet is configured to generate a flow of the auxiliary fluid extending away from the target when the sample capture cell is operably proximate to the target.

30 . The apparatus of claim 21 , wherein an outlet of an auxiliary inlet is in fluid communication with the laser access port.

31 . The apparatus of claim 21 , wherein at least a portion of an auxiliary inlet extends through at least a portion of the sample capture cell.

32 . The apparatus of claim 1 , further comprising a transport conduit coupled to the outlet and configured to transport at least a portion of the sample to a location outside the laser ablation chamber.

33 . The apparatus of claim 32 , wherein the transport conduit includes a first end coupled to the sample capture cell and a second end opposite the first end.

34 . The apparatus of claim 33 , wherein the transport conduit is configured such that at least substantially all of the sample is transportable from the first end to the second end.

35 . The apparatus of claim 33 , wherein a length of the transport conduit from the first end to the second end is less than 2 m.

36 . The apparatus of claim 32 , wherein the transport conduit is formed of fused glass.

37 . The apparatus of claim 32 , wherein the transport conduit is formed of a polymer material selected from the group consisting of PFA, PEEK and PTFE.

38 . The apparatus of claim 32 , wherein the transport conduit is formed of an electrically conductive polymer material.

39 . The apparatus of claim 32 , wherein the transport conduit is formed of at least one ceramic material selected from the group consisting of alumina and sapphire.

40 . The apparatus of claim 32 , wherein the transport conduit is formed of at least one metallic material selected from the group consisting of stainless steel, platinum and copper.

41 . The apparatus of claim 1 , further comprising an injector coupled to the transport conduit, the injector configured to inject at least a portion of the particles transportable from the first end to the second end of the transport conduit into a plasma generatable by a plasma torch.

42 . The apparatus of claim 1 , further comprising an injector coupled to the transport conduit, the injector configured to inject at least a portion of the particles transportable from the first end to the second end of the transport conduit into a plasma generatable by a plasma torch, wherein the injector is configured to inject at least substantially all of the sample transportable from the first end to the second end of the transport conduit into the plasma.

43 . An apparatus for handling a target, the apparatus comprising:

a base having a first side and a second side;

a target holder configured to support the target;

a carriage movably disposed at the first side of the base, wherein the carriage is configured to support target holder; and

a positioning stage movably disposed at the second side of the base, wherein the carriage and the positioning stage are magnetically coupled to each other through the base.

44 . The apparatus of claim 43 , wherein the positioning stage is linearly translatable relative to the base.

45 . The apparatus of claim 44 , wherein the linearly translatable positioning stage is translatable relative to the base along at least two directions.

46 . The apparatus of claim 43 , wherein the positioning stage is rotatable relative to the base.

47 . The apparatus of claim 43 , wherein the carriage includes at least one magnet.

48 . The apparatus of claim 43 , wherein the carriage includes at least one bearing configured to contact the first side of the base.

49 . The apparatus of claim 43 , further comprising a sample generator configured to direct a beam of laser light along an optical path onto a target supportable by the target holder, the beam of laser light configured to ablate at least a portion of the target at a laser ablation site.

50 . The apparatus of claim 43 , further comprising a sample generator configured to direct a beam of laser light along an optical path onto a target supportable by the target holder, the beam of laser light configured to ablate at least a portion of the target at a laser ablation site, wherein the carriage is movable relative to the optical path.

51 . The apparatus of claim 43 , further comprising a frame coupled to the base and enclosing a volume configured to accommodate the target holder, wherein the frame and the base form a chamber.

52 . The apparatus of claim 51 , wherein the frame includes an optical port aligned with the optical path.

53 . The apparatus of claim 52 , further comprising transmission window extending across the optical port, wherein the transmission window is configured to transmit laser light directed by the laser source.

54 . The apparatus of claim 43 , further comprising an injection nozzle configured to generate, from a location within the interior of the sample chamber, a flow of a carrier gas.

55 . The apparatus of claim 54 , wherein the injection nozzle is configured to generate the external flow of the carrier gas from a location outside the sample capture cell.

56 . The apparatus of claim 43 , further comprising a sample capture cell configured to capture at least a portion of an aerosol containing particles ejected from the sample at a laser ablation site.

57 . The apparatus of claim 56 , wherein the sample capture cell is aligned with the optical path.

58 . The apparatus of claim 56 , wherein the sample capture cell is coupled to the frame.

59 . The apparatus of claims 56 , wherein the carriage is movable relative to the sample capture cell.

60 . The apparatus of claim 56 , further comprising a transport conduit coupled to the sample capture cell and the frame, wherein the transport conduit is configured to transport at least a portion of the aerosol from the sample capture cell to a location outside the chamber.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 26, 2018
From: ELECTRO SCIENTIFIC INDUSTRIES, INC.
To: ELEMENTAL SCIENTIFIC LASERS, LLC
Reel/Frame 045037/0641 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 6, 2014
From: SHARP, BARRY L; DOUGLAS, DAVID N; MANAGH, AMY J
To: ELECTRO SCIENTIFIC INDUSTRIES, INC.
Reel/Frame 032371/0441 →